采用耦合有限元方法研究了硅片背面磨削过程中的磨削力和翘曲

IF 1.5 4区 工程技术 Q3 MECHANICS Journal of Mechanics Pub Date : 2023-07-20 DOI:10.1093/jom/ufad018
Mei-Ling Wu, Wei-Jhih Wong, J. Lan
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引用次数: 0

摘要

本文建立了硅片背面磨削过程中磨削力和翘曲的有限元模型。由于智能手机、笔记本电脑和便携式电子产品等消费电子设备的尺寸不断减小,有必要解决与硅片磨削有关的问题。背磨工艺是一项成熟的技术,广泛应用于硅片加工。然而,对于超薄硅片,翘曲是一个关键问题。晶圆片翘曲是由背面磨削过程中产生的残余应力和表面损伤引起的。为了分析硅片背面磨削过程中的磨削应力,通过设置动载荷和接触条件建立了有限元模型。采用显式动力学模型模拟了砂轮与硅片之间的关系。将静态模型与显式动态模型相结合来预测晶圆翘曲。残余应力的模拟结果与实验结果吻合较好。结果表明,砂轮转速、晶圆转速和进给量能有效地控制晶圆翘曲。因此,通过调整制造工艺参数可以减小超薄硅片的翘曲。此外,所建立的仿真模型还可用于分析扇形圆片背面磨削过程中的翘曲现象。
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A coupled finite element scheme to study the grinding force and warpage of silicon wafers during the backside grinding process
In this study, a finite element model is developed to analyze the grinding force and warpage of silicon wafers during the backside grinding process. Due to the decreasing size of consumer electronic devices, such as smartphones, notebooks, and portable electronics, it is necessary to address the issues pertaining to grinding silicon wafers. The backside grinding process is a mature technology that is widely used for silicon wafers. However, for ultrathin silicon wafers, warpage is a critical issue. Wafer warpage is induced by the residual stress and surface damage that arises during the backside grinding process. To analyze the grinding stress on silicon wafers during the backside grinding process, a finite element model is established by setting dynamic loads, and contact conditions. An explicit dynamic model is used to simulate the relationship between the grinding wheel and the silicon wafer. A static model is incorporated with the explicit dynamic model to predict wafer warpage. The simulation results for the residual stress are in good agreement with the experimental results. The results indicate that the wheel rotational speed, wafer rotational speed, and feed rate effectively control wafer warpage. Hence, the warpage of ultrathin silicon wafers can be decreased by adjusting the manufacturing process parameters. Furthermore, the developed simulation model can also be used to analyze warpage in fan-out wafers during the backside grinding process.
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来源期刊
Journal of Mechanics
Journal of Mechanics 物理-力学
CiteScore
3.20
自引率
11.80%
发文量
20
审稿时长
6 months
期刊介绍: The objective of the Journal of Mechanics is to provide an international forum to foster exchange of ideas among mechanics communities in different parts of world. The Journal of Mechanics publishes original research in all fields of theoretical and applied mechanics. The Journal especially welcomes papers that are related to recent technological advances. The contributions, which may be analytical, experimental or numerical, should be of significance to the progress of mechanics. Papers which are merely illustrations of established principles and procedures will generally not be accepted. Reports that are of technical interest are published as short articles. Review articles are published only by invitation.
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