基于NiCr颗粒碳薄膜的应变片蠕变调整

IF 0.8 Q4 INSTRUMENTS & INSTRUMENTATION Journal of Sensors and Sensor Systems Pub Date : 2021-03-12 DOI:10.5194/JSSS-10-53-2021
M. Mathis, Dennis Vollberg, M. Langosch, Dirk Göttel, A. Lellig, G. Schultes
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引用次数: 2

摘要

摘要诸如力传感器或扭矩传感器的高精度机械传感器的一个重要特性是所谓的蠕变误差。它被定义为在恒定负载下随时间的信号偏差。由于这种信号偏差导致传感器的精度降低,因此最小化蠕变误差是有益的。这些传感器中的许多传感器由金属弹簧元件和应变仪组成。为了实现蠕变误差几乎为零的传感器,需要补偿金属弹簧元件的蠕变行为。这可以通过对使用的应变仪进行蠕变调整来实现。与应变系数为2的标准金属箔应变仪不同,一种基于聚合物衬底上溅射沉积的NiCr-碳薄膜的应变仪具有改进的应变系数约为10的优点。然而,对于这种类型的应变计,通过常规方法进行蠕变调整是不可能的。为了弥补这一缺点,进行了全面的蠕变分析。研究了五个主要影响NiCr-碳薄膜应变仪力传感器蠕变误差的因素,即金属弹簧元件(1)的材料蠕变、聚合物衬底(2)的蠕变(弛豫)、薄膜的组成(3)、向薄膜的应变传递(4)和传感器表面的应力场类型(5)。因此,我们提出了两种适用于镍铬碳薄膜应变计蠕变调整的方法。第一种方法通过改变薄膜成分来解决薄膜的固有蠕变行为。随着Cr含量的增加(以Ni为代价),固有的负蠕变误差可以向零偏移。第二种方法不是基于薄膜本身,而是基于改变从聚酰亚胺载体到薄膜的应变传递。这是通过皮秒激光器在聚合物基片中控制切割明确的深沟来实现的。
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Creep adjustment of strain gauges based on granular NiCr-carbon thin films
Abstract. An important property of high-precision mechanical sensors such as force transducers or torque sensors is the so-called creep error. It is defined as the signal deviation over time at a constant load. Since this signal deviation results in a reduced accuracy of the sensor, it is beneficial to minimize the creep error. Many of these sensors consist of a metallic spring element and strain gauges. In order to realize a sensor with a creep error of almost zero, it is necessary to compensate for the creep behavior of the metallic spring element. This can be achieved by creep adjustment of the used strain gauges. Unlike standard metal foil strain gauges with a gauge factor of 2, a type of strain gauges based on sputter-deposited NiCr -carbon thin films on polymer substrates offers the advantage of an improved gauge factor of about 10. However, for this type of strain gauge, creep adjustment by customary methods is not possible. In order to remedy this disadvantage, a thorough creep analysis is carried out. Five major influences on the creep error of force transducers equipped with NiCr -carbon thin-film strain gauges are examined, namely, the material creep of the metallic spring element (1), the creep (relaxation) of the polymer substrate (2), the composition of the thin film (3), the strain transfer to the thin film (4), and the kind of strain field on the surface of the transducer (5). Consequently, we present two applicable methods for creep adjustment of NiCr -carbon thin- film strain gauges. The first method addresses the intrinsic creep behavior of the thin film by a modification of the film composition. With increasing Cr content (at the expense of Ni, the intrinsic negative creep error can be shifted towards zero. The second method is not based on the thin film itself but rather on a modification of the strain transfer from the polyimide carrier to the thin film. This is achieved by controlled cutting of well-defined deep trenches into the polymer substrate via a picosecond laser.
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来源期刊
Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems INSTRUMENTS & INSTRUMENTATION-
CiteScore
2.30
自引率
10.00%
发文量
26
审稿时长
23 weeks
期刊介绍: Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.
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