等离子体辅助真空电弧法制备ZrN/CrN多层涂层的显微组织和残余应力

IF 0.4 Q4 METALLURGY & METALLURGICAL ENGINEERING Obrabotka Metallov-Metal Working and Material Science Pub Date : 2022-09-15 DOI:10.17212/1994-6309-2022-24.3-76-89
A. Vorontsov, A. Filippov, N. Shamarin, E. Moskvichev, O. Novitskaya, Evgenii Knyazhev, Yu. I. Denisova, A. Leonov, V. Denisov
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引用次数: 2

摘要

介绍硬涂层应用领域的现有技术要求使用不同的化学元素形成纳米结构组合物。现代硬质涂层能够结合不同的性能,如高硬度、耐磨性、耐腐蚀性。目前,通过氮化锆和氮化铬的逐层沉积形成的涂层是有前途的。当在各种基底上沉积化学元素的组合时,需要进行旨在研究其微观结构的研究,主要是研究多层涂层沉积过程中形成的残余应力。本工作的目的是研究由气相等离子体辅助真空电弧法形成的ZrN/CrN系统涂层的结构相状态和残余应力。研究方法。研究了在硬质合金VК8基体上沉积氮化锆和氮化铬涂层的样品。透射电子显微镜用于研究多层涂层的微观结构特征,X射线衍射分析用于量化宏观应力。结果和讨论。根据实验结果发现,随着工作台和衬底支架的转速变化,多层ZrN/CrN涂层的沉积模式会导致多层涂层表面层的微观结构、形貌和内应力发生变化。结果表明,通过改变多层涂层沉积的条件,在由VK8合金制成的基底上形成具有纳米级涂层厚度的ZrN/CrN涂层的可能性打开了。X射线衍射分析表明,主要是不显著的应力,并且在高工作台和衬底旋转速度下——多层涂层中的高压缩应力。透射电子显微镜显示,CrN和ZrN涂层在低转速下具有共同的多层涂层生长织构,并且在高速下观察到涂层相的织构取向差。根据所获得的结果,可以推荐ZrN/CrN体系的涂层作为硬涂层。
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Microstructure and residual stresses of ZrN/CrN multilayer coatings formed by the plasma-assisted vacuum-arc method
Introduction. The current state of the art in the field of hard coatings application requires the formation of nanostructured compositions using different chemical elements. Modern hard coatings are able to combine different properties such as high hardness, wear resistance, corrosion resistance. At present, coatings formed by layer-by-layer deposition of zirconium and chromium nitrides are promising. When depositing combinations of chemical elements on various substrates, studies are required aimed at investigating its microstructure and, mainly, residual stresses formed during the deposition of multilayer coatings. The purpose of this work is to investigate the structural-phase state and residual stresses of ZrN/CrN system coatings formed by plasma-assisted vacuum-arc method from the gas phase. Research methods. Samples with coatings of zirconium and chromium nitrides deposited on substrates of hard alloy VК8 are investigated. Transmission electron microscopy is used to study the microstructural characteristics of multilayered coatings and X-ray diffraction analysis is used to quantify macroscopic stresses. Results and discussion. Based on the experimental results obtained it is found that changing the modes of deposition of multilayer ZrN/CrN coatings with regard to rotation speeds of table and substrate holder leads to variations in microstructure, morphology and internal stresses of surface layers of multilayer coatings. It is shown that by changing conditions for the multilayer coating deposition the possibilities of forming ZrN/CrN coatings on the substrate made of VK8 alloy with nanoscale thickness of coating layers open up. X-ray diffraction analysis indicates mainly insignificant stresses, and at high table and substrate rotation speeds – high compressive stresses in the multilayer coating. Transmission electron microscopy revealed that CrN and ZrN coatings have a common multilayer coating growth texture at low rotation speeds, and at high speeds a textural misorientation of the phases of the coating layers is observed. Based on the results obtained it is possible to recommend coatings of ZrN/CrN system as hard coatings.
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来源期刊
Obrabotka Metallov-Metal Working and Material Science
Obrabotka Metallov-Metal Working and Material Science METALLURGY & METALLURGICAL ENGINEERING-
CiteScore
1.10
自引率
50.00%
发文量
26
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