热退火对α粒子辐照MIS器件AuTa2O5GaAs电学特性的影响

IF 1 4区 材料科学 Journal of Ovonic Research Pub Date : 2023-07-01 DOI:10.15251/jor.2023.194.359
S. M. Al-Begg, S. H. Saeed, A. Al-Rawas
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引用次数: 0

摘要

使用由AuTa2O5GaAs制成的α粒子辐照MIS器件来研究热退火如何影响I-V特性,以及电流如何随着退火温度、辐射能量和电压偏置而变化。MIS结构的超级栅极是通过在约10-5托的真空下使用热蒸发来构建1000°a厚的金层而制成的。在室温下,设备暴露于来自放射源226Ra(0.5 Ci)的α粒子,能量为5.1、4、3、1.8和1.2 MeV,持续0-30分钟。在10-3托的真空中在150、200和300℃下退火30分钟后,发现辐照器件的电流-电压(I-V)特性。在热退火过程中,在0.4、1和2V的偏置电压和150、200和300°C的温度下,可以看到不同的结果。在150°C下退火器件不会改变其稳定性,但在300°C下进行退火会导致器件性能的欧姆传导。当设备被加热到200摄氏度然后冷却时,设备的电流可以得到最好的固定。此外,热退火似乎对器件的I–V电特性有不同的影响,这取决于粒子的能量和电压偏置。
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Thermal annealing effects on the electrical characteristics of alpha particles irradiated MIS device AuTa2O5GaAs
An alpha particle-irradiated MIS device made of AuTa2O5GaAs was used to study how thermal annealing affects the I-V characteristics and how the current changes with annealing temperature, radiation energy, and voltage biassing. The super-gate of the MIS structure was made by using thermal evaporation to build a 1000°A thick layer of gold under a vacuum of about 10-5 torr. At room temperature, the devices were exposed to alpha particles from the radioactive source 226Ra (0.5 Ci) with energies of 5.1, 4, 3, 1.8, and 1.2 MeV for 0–30 minutes. After 30 minutes of annealing at 150, 200, and 300 o C in a vacuum of 10-3 torr, the current-voltage (I-V) characteristics of the irradiation devices were found. During thermal annealing, different results were seen with bias voltages of 0.4, 1, and 2 V and temperatures of 150, 200, and 300 o C. Annealing the device at 150 o C doesn't change how stable it is, but annealing it at 300 o C causes ohmic conduction in the device's properties. The device's current can be fixed best when the device is heated to 200 o C and then cooled. Also, thermal annealing seems to have different effects on the I–V electrical characteristics of the devices depending on the energy of the particles and the voltage biassing.
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来源期刊
Journal of Ovonic Research
Journal of Ovonic Research Materials Science-Electronic, Optical and Magnetic Materials
CiteScore
1.60
自引率
20.00%
发文量
77
期刊介绍: Journal of Ovonic Research (JOR) appears with six issues per year and is open to the reviews, papers, short communications and breakings news inserted as Short Notes, in the field of ovonic (mainly chalcogenide) materials for memories, smart materials based on ovonic materials (combinations of various elements including chalcogenides), materials with nano-structures based on various alloys, as well as semiconducting materials and alloys based on amorphous silicon, germanium, carbon in their various nanostructured forms, either simple or doped/alloyed with hydrogen, fluorine, chlorine and other elements of high interest for applications in electronics and optoelectronics. Papers on minerals with possible applications in electronics and optoelectronics are encouraged.
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