基于铟锡氧化物的等离子体狭缝波导红外气体传感器的数值分析

IF 0.8 Q4 INSTRUMENTS & INSTRUMENTATION Journal of Sensors and Sensor Systems Pub Date : 2022-01-14 DOI:10.5194/jsss-11-15-2022
P. Saeidi, B. Jakoby, G. Pühringer, A. Tortschanoff, G. Stocker, J. Spettel, T. Grille, R. Jannesari
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引用次数: 1

摘要

摘要等离子体波导由于其在金属-介电界面处的高场强和在纳米尺度上限制模式的能力而受到广泛关注。同时,由于金属的存在,它们遭受相对较高的传播损耗。已经引入了几种替代材料来取代贵金属,例如透明导电氧化物(tco)。特别流行的TCO是氧化铟锡(ITO),它与标准微机电系统(MEMS)技术兼容。在这项工作中,研究了ITO作为等离子体材料替代红外吸收传感应用的可行性:我们数值设计和优化了一个基于ITO的等离子体缝隙波导,波长为4.26µm,这是CO2的吸收线。我们的优化是基于优值图(FOM),它被定义为约束因子除以有效模态指数的虚部(即模态的固有阻尼)。得到的最优FOM为3.2,对应于传输长度(表征本征阻尼)为9µm,约束因子为49%。
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Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide
Abstract. Plasmonic waveguides have attracted much attention owing to the associated high field intensity at the metal–dielectric interface and their ability to confine the modes at the nanometer scale. At the same time, they suffer from relatively high propagation loss, which is due to the presence of metal. Several alternative materials have been introduced to replace noble metals, such as transparent conductive oxides (TCOs). A particularly popular TCO is indium tin oxide (ITO), which is compatible with standard microelectromechanical systems (MEMS) technology. In this work, the feasibility of ITO as an alternative plasmonic material is investigated for infrared absorption sensing applications: we numerically design and optimize an ITO-based plasmonic slot waveguide for a wavelength of 4.26 µm, which is the absorption line of CO2. Our optimization is based on a figure of merit (FOM), which is defined as the confinement factor divided by the imaginary part of the effective mode index (i.e., the intrinsic damping of the mode). The obtained optimal FOM is 3.2, which corresponds to 9 µm and 49 % for the propagation length (characterizing the intrinsic damping) and the confinement factor, respectively.
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来源期刊
Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems INSTRUMENTS & INSTRUMENTATION-
CiteScore
2.30
自引率
10.00%
发文量
26
审稿时长
23 weeks
期刊介绍: Journal of Sensors and Sensor Systems (JSSS) is an international open-access journal dedicated to science, application, and advancement of sensors and sensors as part of measurement systems. The emphasis is on sensor principles and phenomena, measuring systems, sensor technologies, and applications. The goal of JSSS is to provide a platform for scientists and professionals in academia – as well as for developers, engineers, and users – to discuss new developments and advancements in sensors and sensor systems.
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