The Effect of Plasma Pretreatment on the Morphology and Properties of Hitus Coatings

Abstract WC coatings prepared by High Target Utilization Sputtering (HITUS), a relatively new technology, were deposited on three types of substrates. These were silicon (111), steel (100Cr6), and ceramic (WC-Co). The influence of RF plasma power pretreatment on final properties of WC coatings was investigated with two interlayer materials for bonding. The morphology, roughness, and mechanical properties of coatings were studied. The relation between plasma RF power and roughness was found. No significant change in mechanical properties was detected with change in plasma RF power. The dependence of nanohardness and scratch behavior on HITUS WC coatings was investigated.