磁控溅射沉积在镍钛合金表面形成特定结构的钽涂层

IF 3.1 Q2 MATERIALS SCIENCE, COMPOSITES Functional Composites and Structures Pub Date : 2022-11-20 DOI:10.1088/2631-6331/aca461
А. Larionov, А. Dikov, S. O. Akayev, L. Dikova, Е. Zhakanbayev, К. B. Sarsenbaeva
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引用次数: 0

摘要

提出了在具有形状记忆效应的NiTi合金表面涂覆具有给定结构的钽涂层以提高该合金植入物的生物相容性的方法。采用直流磁控溅射法合成了涂层。已经确定了结构相状态根据涂层厚度的变化顺序,即其沉积速率。研究表明,在低磁控管功率~14W的条件下,在镍化钛表面成功地合成了具有bcc结构和高度完美晶格的单相α-Ta涂层。
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Formation of tantalum coatings with a given structure on the surface of niti alloy by magnetron sputter deposition
Way for applying tantalum coating with a given structure to the surface of an alloy with a shape memory effect NiTi to increase the biocompatibility of implants from this alloy is presented. The coating was synthesized by direct current (DC) magnetron sputtering. The changes sequence of the structural-phase states depending on the thickness of the coating, that is, the rate of its deposition, has been established. It is shown that at a low magnetron power, ∼14 W in present study, a single-phase α-Ta coating with a bcc structure and a high degree of perfection of the crystal lattice is successfully synthesized on the titanium nickelide surface.
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来源期刊
Functional Composites and Structures
Functional Composites and Structures Materials Science-Materials Science (miscellaneous)
CiteScore
4.80
自引率
10.70%
发文量
33
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