单纳米线器件与片上光子学和电子学的确定性集成

IF 7.4 1区 物理与天体物理 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC Progress in Quantum Electronics Pub Date : 2022-08-01 DOI:10.1016/j.pquantelec.2022.100394
D. Jevtics, B. Guilhabert, A. Hurtado, M.D. Dawson, M.J. Strain
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引用次数: 6

摘要

纳米线几何形状的半导体材料的外延生长使新型紧凑的微米级光电器件成为可能。单纳米线器件的确定性选择和集成,来自大量增长的群体,需要具有高空间精度和产量,以使其与片上系统集成。在这篇综述中,我们重点介绍了单纳米线从生长基质转移到目标芯片的主要方法。我们提出了一系列由单个NW传输启用的芯片级设备,包括光源,接收器和波导网络。讨论了常用集成方法的可扩展性及其与标准光刻方法和电子接触的兼容性。
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Deterministic integration of single nanowire devices with on-chip photonics and electronics

The epitaxial growth of semiconductor materials in nanowire geometries is enabling a new class of compact, micron scale optoelectronic devices. The deterministic selection and integration of single nanowire devices, from large growth populations, is required with high spatial accuracy and yield to enable their integration with on-chip systems. In this review we highlight the main methods by which single nanowires can be transferred from their growth substrate to a target chip. We present a range of chip-scale devices enabled by single NW transfer, including optical sources, receivers and waveguide networks. We discuss the scalability of common integration methods and their compatibility with standard lithographic methods and electronic contacting.

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来源期刊
Progress in Quantum Electronics
Progress in Quantum Electronics 工程技术-工程:电子与电气
CiteScore
18.50
自引率
0.00%
发文量
23
审稿时长
150 days
期刊介绍: Progress in Quantum Electronics, established in 1969, is an esteemed international review journal dedicated to sharing cutting-edge topics in quantum electronics and its applications. The journal disseminates papers covering theoretical and experimental aspects of contemporary research, including advances in physics, technology, and engineering relevant to quantum electronics. It also encourages interdisciplinary research, welcoming papers that contribute new knowledge in areas such as bio and nano-related work.
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