基于籽晶硅衬底的液滴浇铸法制备紫外ZnO NRS光电探测器

IF 0.7 4区 工程技术 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC Microelectronics International Pub Date : 2022-08-23 DOI:10.1108/mi-03-2022-0046
S. M. Abed, S. M. Mohammad, Z. Hassan, A. Muhammad, Suvindraj Rajamanickam
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引用次数: 0

摘要

目的本研究的目的是基于在籽晶硅(Si)衬底上生长的氧化锌纳米棒(ZnO-NRs),通过低成本的方法(滴注技术)制备紫外(UV)金属半导体金属(MSM)光电探测器,使用水热法生长ZnO NRs,随后使用直流溅射技术制造UV MSM光电探测器。通过电流-电压(I–V)测量研究了所制造的MSM器件的性能。讨论了该器件的光电探测机理。发现半垂直高密度ZnO(NRs)在(002)方向上具有优先取向,并通过X射线衍射分析证实了结晶度的提高。光致发光结果显示出高UV区域。所制备的MSM紫外光电探测器表明,ZnO(NRs)MSM器件具有良好的时间稳定性、高光电流、良好的灵敏度和高响应度 nm波长照明和0 V、 1伏,2 V和3 V施加偏压。所制备的ZnO NRs紫外光电探测器的响应度和灵敏度为0.015 A W-1,0.383 W-1,1.290 A W-1和1.982 在紫外线(365 nm)照明 V、 1 V、 2 V和3 V) .独创性/价值本文采用液滴铸造技术和水热法作为简单、低成本的方法来制备和改进ZnO NRs光电探测器。
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Fabrication of UV ZnO NRS photodetector based on seeded silicon substrate via the drop-casting technique
Purpose The purpose of this study is to fabricate an ultraviolet (UV) metal-semiconductor-metal (MSM) photodetector based on zinc oxide nanorods (ZnO NRs) grown on seeded silicon (Si) substrate that was prepared by a low-cost method (drop-casting technique). Design/methodology/approach The drop-casting method was used for the seed layer deposition, the hydrothermal method was used for the growth of ZnO NRs and subsequent fabrication of UV MSM photodetector was done using the direct current sputtering technique. The performance of the fabricated MSM devices was investigated by current–voltage (I–V) measurements. The photodetection mechanism of the fabricated device was discussed. Findings Semi-vertically high-density ZnO (NRs) were effectively produced with a preferential orientation along the (002) direction, and increased crystallinity is confirmed by X-ray diffraction analysis. Photoluminescence results show a high UV region. The fabricated MSM UV photodetector showed that the ZnO (NRs) MSM device has great stability over time, high photocurrent, good sensitivity and high responsivity under 365 nm wavelength illumination and 0 V, 1 V, 2 V and 3 V applied bias. The responsivity and sensitivity for the fabricated ZnO NRs UV photodetector are 0.015 A W-1, 0.383 A W-1, 1.290 A W-1 and 1.982 A W-1 and 15,030, 42.639, 100.173 and 334.029, respectively, under UV light (365 nm) illumination at (0 V, 1 V, 2 V and 3 V). Originality/value This paper uses the drop-casting technique and the hydrothermal method as simple and low-cost methods to fabricate and improve the ZnO NRs photodetector.
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来源期刊
Microelectronics International
Microelectronics International 工程技术-材料科学:综合
CiteScore
1.90
自引率
9.10%
发文量
28
审稿时长
>12 weeks
期刊介绍: Microelectronics International provides an authoritative, international and independent forum for the critical evaluation and dissemination of research and development, applications, processes and current practices relating to advanced packaging, micro-circuit engineering, interconnection, semiconductor technology and systems engineering. It represents a current, comprehensive and practical information tool. The Editor, Dr John Atkinson, welcomes contributions to the journal including technical papers, research papers, case studies and review papers for publication. Please view the Author Guidelines for further details. Microelectronics International comprises a multi-disciplinary study of the key technologies and related issues associated with the design, manufacture, assembly and various applications of miniaturized electronic devices and advanced packages. Among the broad range of topics covered are: • Advanced packaging • Ceramics • Chip attachment • Chip on board (COB) • Chip scale packaging • Flexible substrates • MEMS • Micro-circuit technology • Microelectronic materials • Multichip modules (MCMs) • Organic/polymer electronics • Printed electronics • Semiconductor technology • Solid state sensors • Thermal management • Thick/thin film technology • Wafer scale processing.
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