等离子体喷射法制备Al2O3 /PVA纳米复合薄膜

Q2 Pharmacology, Toxicology and Pharmaceutics Science and Technology Indonesia Pub Date : 2023-07-06 DOI:10.26554/sti.2023.8.3.471-478
S. J. Kadhem
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引用次数: 0

摘要

氧化铝薄膜在光电子、光学、电绝缘体、传感器和摩擦学等领域有着重要的应用。这项工作的新颖之处在于,分几个阶段制备均匀的氧化铝薄膜,以产生等离子体射流。本文采用爆炸线等离子体法制备了悬浮在乙烯醇中的铝纳米粒子。使用TEM分析来确定铝和乙烯醇悬浮液中颗粒的大小和形状;TEM图像显示颗粒尺寸为17.2nm。在氩气流量为1L/min的室温下,采用等离子体射流技术在石英衬底上制备了铝/聚乙烯醇(Al/PVA)薄膜。将Al/PVA薄膜热转化为氧化铝薄膜,在不同温度(700、800或900°C)下退火。利用X射线衍射(XRD)、原子力显微镜(AFM)、透射电子显微镜(TEM)、扫描电子显微镜(SEM)和傅里叶变换红外光谱(FTIR)技术对退火前后的薄膜进行了表征。所制备的薄膜在进行退火处理之前的衍射图案表明存在属于铝和PVA的峰;然而,退火处理后获得的这些膜的衍射图和FTIR光谱显示出表明形成不同相的氧化铝膜的峰。AFM和SEM研究证明,所有制备的薄膜在退火过程前后形成的颗粒尺寸相似,几乎呈球形;颗粒的直径在几纳米的数量级上。为了控制制备的薄膜的性能,用分光光度法对用于制备薄膜的等离子体进行诊断。使用光学发射光谱来诊断产生的等离子体,以估计电子温度Te;电子温度为1.925eV。
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Preparation of Al2O3 /PVA Nanocomposite Thin Films by a Plasma Jet Method
Alumina thin films have significant applications in the areas of optoelectronics, optics, electrical insulators, sensors and tribology. The novel aspect of this work is that the homogeneous alumina thin films were prepared in several stages to generate a plasma jet. In this paper, aluminium nanoparticles suspended in vinyl alcohol were prepared using exploding wire plasma. TEM analysis was used to determine the size and shape of particles in aluminium and vinyl alcohol suspensions; the TEM images showed that the particle size is 17.2 nm. Aluminium/poly vinyl alcohol (Al/PVA) thin films were prepared using this suspension on quartz substrate by plasma jet technique at room temperature with an argon gas flow rate of 1 L/min. The Al/PVA thin films were thermally converted to alumina films, where they were annealed at different temperatures (700, 800, or 900°C). X-ray diffraction (XRD), atomic force microscopy (AFM), transmission electron microscopy (TEM), scanning electron microscopy (SEM), and Fourier transform infrared spectroscopy (FTIR) techniques were used to characterise these thin films before and after annealing process. The diffraction patterns of the prepared thin films before subjecting them to the annealing process indicated the presence of peaks belonging to aluminium and PVA; however, the diffraction patterns and FTIR spectra obtained for these films after the annealing process showed peaks indicating the formation of alumina films of different phases. AFM and SEM investigations proved that the formed particles for all prepared films before and after the annealing process were similar in size and almost spherical; the diameter of the particles was on the order of a few nanometres. To control the properties of prepared thin films, the plasma which was used to produce thin films is diagnosed spectrophotometrically. The generated plasma was diagnosed using optical emission spectroscopy to estimate the electron temperature Te; the electron temperature was 1.925 eV.
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来源期刊
Science and Technology Indonesia
Science and Technology Indonesia Pharmacology, Toxicology and Pharmaceutics-Pharmacology, Toxicology and Pharmaceutics (miscellaneous)
CiteScore
1.80
自引率
0.00%
发文量
72
审稿时长
8 weeks
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