Dual-Axis MEMS Resonant Scanner Using 128∘Y Lithium Niobate Thin-Film

The micro-electro-mechanical systems (MEMS) resonant scanners are in great demand for numerous light scanning applications. Recently, the development of LiDAR in micro-robotics and mobile devices has led to the requirement of ultra-small systems with low driving voltage, low power, compact size and high performance. We have first proposed the dual-axis MEMS scanner using the lithium niobate (LN) thin-film platform, which is expected to fulfill the requirement. This paper describes the actuation principle and scanner structure, meanwhile develops the analytical model for the scanner. The analytical model is later validated by the finite element analysis. The performance of the proposed scanner is improved with the optimization of the orientation of LN and layer thickness. The proposed scanner achieves the θopt·D·f up to 937.8∘·mm·kHz in simulation. The simulated optical angle in the x-axis and y-axis are 50∘ and 42∘ at 1 V, corresponding to resonant frequencies of 79.9 kHz and 558.2 kHz, respectively. With the superior performance of large deflection, high scanning frequency, high figure of merit and low voltage, the proposed MEMS scanner is a promising candidate for fast scanner applications (e.g., wavelength-selective switches and submicron biomedical system), especially the application of LiDAR in mobile devices or micro-robotics.