金属电极对PZT薄膜电容器稳态泄漏电流的影响

IF 1.7 4区 材料科学 Q2 MATERIALS SCIENCE, CERAMICS Journal of Electroceramics Pub Date : 2022-06-25 DOI:10.1007/s10832-022-00288-5
Yury V. Podgorny, Alexander N. Antonovich, Alexey A. Petrushin, Alexander S. Sigov, Konstantin A. Vorotilov
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引用次数: 2

摘要

采用电子束感应电流(EBIC)技术研究了铁电Ir/PZT/Pt和Au/PZT/Pt电容器的稳态电流-电压依赖关系。EBIC数据揭示了在外加电场作用下,氧空位\({V}_{o}^{**}\)迁移引起的PZT/金属界面局部场的变化。Ir/PZT和Pt/PZT界面阻碍\({V}_{o}^{**}\)运动,导致它们在阴极界面附近积聚。电子从金属阴极注入PZT导致诱导p-n结的形成。这种情况下的稳态泄漏电流可以用修正的p-n二极管方程很好地描述,该方程考虑了电子注入引起的反电场作用。在透明氧空位的情况下,Au/PZT阴极氧空位留下PZT体,并且电流-电压依赖性在高电场下显示出负差分电导率区域。所提出的pn结形式可用于压电陶瓷器件的工程设计。
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Effect of metal electrodes on the steady-state leakage current in PZT thin film capacitors

The ferroelectric Ir/PZT/Pt and Au/PZT/Pt capacitor structures are studied by the electron beam induced current (EBIC) technique and the steady-state current–voltage dependencies. EBIC data reveal the change in the local field at the PZT/metal interfaces caused by migration of oxygen vacancies \({V}_{o}^{**}\) under an action of applied electric field. Ir/PZT and Pt/PZT interfaces block \({V}_{o}^{**}\) movement causing their accumulation near the cathode interface. An electrons injection from the metal cathode to the PZT leads to formation of induced p–n junction. The steady-state leakage current in this case is well described by modified equation for the p-n diode, which considers an action of the counter electric field caused by electrons injection. In the case of transparent for oxygen vacancies Au/PZT cathode oxygen vacancies leave the PZT bulk and current–voltage dependence demonstrates a region of negative differential conductivity at high electric fields. The proposed p–n junction formalism can be used for engineering of PZT-based devices.

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来源期刊
Journal of Electroceramics
Journal of Electroceramics 工程技术-材料科学:硅酸盐
CiteScore
2.80
自引率
5.90%
发文量
22
审稿时长
5.7 months
期刊介绍: While ceramics have traditionally been admired for their mechanical, chemical and thermal stability, their unique electrical, optical and magnetic properties have become of increasing importance in many key technologies including communications, energy conversion and storage, electronics and automation. Electroceramics benefit greatly from their versatility in properties including: -insulating to metallic and fast ion conductivity -piezo-, ferro-, and pyro-electricity -electro- and nonlinear optical properties -feromagnetism. When combined with thermal, mechanical, and chemical stability, these properties often render them the materials of choice. The Journal of Electroceramics is dedicated to providing a forum of discussion cutting across issues in electrical, optical, and magnetic ceramics. Driven by the need for miniaturization, cost, and enhanced functionality, the field of electroceramics is growing rapidly in many new directions. The Journal encourages discussions of resultant trends concerning silicon-electroceramic integration, nanotechnology, ceramic-polymer composites, grain boundary and defect engineering, etc.
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