利用压电晶圆的非均匀极化调谐机电共振的相对强度

Anurup Guha;Cristian Pantea;Vamshi Krishna Chillara
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引用次数: 0

摘要

均匀极化的自由压电片在低频范围内表现出多种径向振动模式。这些径向模共振的强度是固定的,并随着频率或模数的增加而减小。在本文中,我们展示了压电晶片可以被设计成具有适当的非均匀极化曲线,以选择性地激发单个或多个径向模式的任何组合,并具有改变机电共振相对强度的额外能力,这是均匀极化不可能实现的。我们首先讨论基于傅里叶-贝塞尔展开技术的方法背后的理论。然后,我们提出了几个例子,证明了利用轴对称、非均匀极化剖面调整压电盘中机电共振相对强度的能力。本文提出的方法可用于设计多频操作的单元件换能器、频率调谐传感器/接收器、水声准直波源以及其他非传统应用,如信息存储。
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Tuning the Relative Strengths of Electromechanical Resonances Using Non-Uniform Polarization of Piezoelectric Wafers
A free piezoelectric disc with uniform polarization shows multiple radial modes of vibration that occur in the low-frequency range. The strength of these radial mode resonances is fixed and reduces with increasing frequency or mode number. In this article, we show that piezoelectric wafers can be designed with appropriate non-uniform polarization profiles to selectively excite single or any combination of multiple radial modes with an additional capability of altering the relative strengths of electromechanical resonances that is not possible with uniform polarization. We first discuss the theory behind our approach based on a Fourier-Bessel expansion technique. Then, we present several examples demonstrating the capability of tuning the relative strengths of electromechanical resonances in a piezoelectric disc using axisymmetric, non-uniform polarization profiles. The methodology presented in this article finds application in the design of single element transducers with multi-frequency operation, frequency-tuned sensors/receivers, collimated beam sources for underwater acoustics, and other non-traditional applications such as information storage.
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