Fabrication and characteristics of electret ultrasonic-sensor using laser patterning

In this study, in an electret capacitor sensor (ECS), which is an electromechanical exchange device consisting of an electret sandwiched between two electrodes, ridges as spacers and grooves as gaps were formed in the PTFE (polytetrafluoroethylene) layer of the insulating electrode by laser ablation. The ECSs were then fabricated using PTFE electrets, and the charge retention and airborne ultrasonic wave transmitting and receiving characteristics were investigated. The charge retention characteristics of the ECS with laser-patterned insulating electrodes were slightly lower than those of the silica-aggregate electret. As the thickness of the insulating layer increased or the groove width decreased, the transmitting and receiving sensitivity increased significantly and then peaked and degraded at the measurements of transmitting and receiving. The ECS with the highest peak sensitivity obtained by laser patterning had a bandwidth comparable to that of the conventional ECS with silica aggregate electret, but the peak sensitivity was improved by up to 8 dB. Therefore, laser patterning could contribute to the improvement of ECS performance.