热边界电阻存在下硅铝薄膜的温度分布

S. Mansoor, B. Yilbas
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引用次数: 3

摘要

研究了硅铝两层薄膜中的声子输运。利用声子辐射能量传递预测硅膜中的平衡温度分布,利用改进的双方程模型预测铝膜中的电子和声子温度。在两种膜的界面处引入了热边界阻。在硅膜加热初期,平衡温度衰减明显。在铝膜界面附近声子温度仍然高于电子温度。在铝膜的中厚度处,电子和声子温度趋于一致。
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Temperature Distribution in Silicon-Aluminum Thin Films with Presence of Thermal Boundary Resistance
Phonon transport in two-layer films, consisting of silicon and aluminum, is considered. Phonon radiative energy transfer is incorporated to predict equilibrium temperature distribution in the silicon film, while the modified two-equation model is used to predict electron and phonon temperatures in the aluminum film. The thermal boundary resistance is introduced at the interface of both films. Equilibrium temperature decay is found to be sharp in the early heating period in the silicon film. Phonon temperature remains higher than electron temperature in the vicinity of the interface of aluminum film. Electron and phonon temperature become the same at mid-thickness of the aluminum film.
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Transport Theory and Statistical Physics
Transport Theory and Statistical Physics 物理-物理:数学物理
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