140 GHz的MEMS矩形波导滤波器

IF 0.6 4区物理与天体物理 Q4 OPTICS 红外与毫米波学报 Pub Date : 2013-01-01 DOI:10.3724/sp.j.1010.2013.00165

Zhao Xing

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引用次数: 5

摘要

设计并制作了d波段MEMS矩形波导虹膜滤波器。研究了金属化层厚度和膜层粗糙度对滤光片性能的影响。采用DRIE法制备原型机。采用了深蚀刻、电镀和键合等多种工艺制备该滤光片。首次实现了中心频率为(140±3)GHz、插入损耗0.4 ~ 0.7 db、隔离度大于18dB的MEMS波导光圈滤波器。试验结果与模拟结果一致。

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MEMS rectangular waveguide filter at 140 GHz

The D-band MEMS rectangular waveguide iris filter was designed and fabricated.The effects of thicknesses of both metalized layer and iris,and their roughness on the performances of the filter were investigated.The prototypes were fabricated using DRIE method.Several techniques including deep etching,electroplating and bonding were employed for the fabrication of the filter.The MEMS waveguide iris filter with a central frequency of(140±3) GHz,insert loss 0.4-0.7dB,and isolation larger than 18dB has been accomplished for the first time.The test results were in agreement with the simulations.

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