基于显微镜光学杠杆的微结构偏转角测量系统

Q4 Physics and Astronomy 光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144003.0219

刘. L. Lu, 李艳宁 Li Yanning, 吴. W. Sen, 胡晓东 Hu Xiaodong

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引用次数: 0

摘要

介绍了一种用于显微结构偏转角测量的显微系统。该显微镜由无限共轭成像系统和集成光学杠杆组成。光杆的激光束被无限物镜聚焦到小于10μm的尺寸。设计了用于光杠杆信号处理的电流模电路，带宽达到5MHz。系统的测量范围为±4°，分辨率为1.2″。作为试验，利用该系统测量了原子力显微镜悬臂探针在阶跃载荷作用下的自由端挠度。实测结果与铁木辛科光束理论计算结果吻合较好。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Deflection angle measurement system for microstructure based on microscope optical lever

A microscope system for the deflection angle measurement of microstructures is presented.The microscope consists of an infinite conjugate imaging system and an integrated optical lever.The laser beam of the optical lever is focused by the infinite objective to a size less than 10μm.A current-mode circuit is designed for signal processing for the optical lever,and 5MHz in bandwidth is achieved.The measurement range and resolution of the system are±4°and 1.2″, respectively.As a test,the system is used to measure the deflection angles at the free end of a cantilever probe of atomic force microscope under step load.The measurement results are consistent well with the calculation by using Timoshenko beam theory.

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".