光刻投影透镜波前误差的公差分析方法

Q4 Physics and Astronomy 光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144004.0289

符媛英 Fu Yuanying, 李艳秋 Li Yanqiu, 刘晓林 Liu Xiaolin, 曹. C. Zhen, 刘. L. Ke

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引用次数: 2

摘要

为了保证光刻投影透镜的性能，降低光刻投影透镜的制造成本，提出了一种简单可靠的公差分析方法。该方法将P-V波前误差定义为基于有效值波前误差的功绩函数，并选择最优补偿器。与现有方法相比，该方法采用较少的补偿器，降低了机械复杂度，降低了制造成本，均方根波前误差和P-V波前误差均达到了要求。并将该方法应用于自行设计的90nm分辨率光刻投影透镜的折射投影透镜。结果表明，仅使用7个补偿器时，RMS波前误差和P-V波前误差在97.7%的概率下分别小于0.0412λ和0.2469λ。总之，该方法能够满足光刻投影透镜的性能要求。

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A method of tolerance analysis for wavefront error of lithographic projection lens

A simple and reliable method of tolerance analysis is proposed to ensure the performance of lithographic projection lens and minimize the manufacturing costs of lithographic projection lens.This method defines P-V wavefront error as merit function based on RMS wavefront error,and selects the optimal compensators.Compared to present methods,this method decreases mechanical complexity and minimizes the manufacturing costs by adopting less compensators,with both RMS wavefront error and P-V wavefront error achieving the requirement.As an example the method is applied to a refractive projection lens for 90nm resolution lithography projection lens designed by us.The results show that,only with 7compensators,RMS wavefront error and P-V wavefront error at 97.7%probability are less than 0.0412λand 0.2469λ,respectively.In conclusion,this method is able to meet the performance requirement of lithographic projection lens.

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".