用线锯制造单晶硅单色仪的研究

Q4 Physics and Astronomy 光学技术 Pub Date : 2014-01-01 DOI:10.3788/GXJS20144004.0302

冯新康 Feng Xinkang, 徐中民 Xu Zhong-min, 张翼飞 Zhang Yifei, 杨铁莹 Yang Tieying, 王. W. Jie, 王纳秀 Wang Na-xiu

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引用次数: 0

摘要

单晶硅作为一种优良的衍射元件，被广泛应用于同步辐射设施中光束线站的单色仪中。在制造过程中寻找降低残余应变的方法具有重要意义。介绍了取向理论，利用金刚石往复线锯加工衍射单晶硅。在SSRF的BL14Bstation上测试了加工表面的粗糙度和表面形状，并测量了其摆动曲线。结果表明，所得数据满足设计要求。

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Study on manufacturing a single-crystal silicon monochromator using wire saw machine

As a good diffracted component,single-crystal silicon is commonly used in monochromators of beamline stations in synchrotron radiation facilities.It is significant to find methods to reduce the residual strain during the manufacturing process.The orientation theory is introduced and a reciprocating wire saw machine with diamond is used to manufacture a diffracted single-crystal silicon.Roughness and surface shape of the processing surface are tested and its rocking curve is measured in BL14Bstation at SSRF.The result shows that the data meet the design requirements.

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来源期刊

光学技术 Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

0.60

自引率

0.00%

发文量

6699

期刊介绍： The predecessor of Optical Technology was Optical Technology, which was founded in 1975. At that time, the Fifth Ministry of Machine Building entrusted the School of Optoelectronics of Beijing Institute of Technology to publish the journal, and it was officially approved by the State Administration of Press, Publication, Radio, Film and Television for external distribution. From 1975 to 1979, the magazine was named Optical Technology, a quarterly with 4 issues per year; from 1980 to the present, the magazine is named Optical Technology, a bimonthly with 6 issues per year, published on the 20th of odd months. The publication policy is: to serve the national economic construction, implement the development of the national economy, serve production and scientific research, and implement the publication policy of "letting a hundred flowers bloom and a hundred schools of thought contend".