Nanostructures of Thin Films Near the Surface Examined by GISAXS Utilizing Tender X-rays

Recent results on grazing-incidence small-angle scattering have been introduced with emphasis on the use of tender Xrays. Merit of using longer wavelength to understand depth dependence of nanostructures in thin films are presented, along with some drawbacks in using long wavelength. Applications on semiconductor nanodots and micro-phase separated block copolymer thin films are shown. Use of resonant scattering in the tender X-ray region gives opportunity for contrast matching GISAXS experiments, which may reduce complicated situation of dynamical effect upon analysis.