喷涂氧化铁薄膜的结构和光学性能

I. Tomsah
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摘要

本文采用喷雾热解技术,以8 ml/min的喷射流量将FeCl3·6H2O (10 -2 M)基水溶液喷射到350℃加热的玻璃基板上,制备α-Fe2O3薄膜。沉积后得到铁锈红和非晶膜。在400℃下热处理6小时后,薄膜结晶良好。利用电子扫描显微镜(SEM)和x射线衍射仪(XRD)对膜的表面形貌和晶体结构进行了研究。用紫外-可见-近红外分光光度计在200 ~ 2500 nm波长范围内测定了氧化铁薄膜的透过率和反射率。利用变角椭偏仪在400 ~ 1800 nm波长范围内采集的数据,完成了氧化铁薄膜光学性质的研究。结果表明:喷涂后的薄膜为非晶态,热处理后的薄膜在α-Fe2O3相中结晶;SEM图像显示薄膜致密且均匀,氧化铁薄膜允许直接跃迁的光学带隙估计为2.15 eV。另一方面,椭偏建模计算得到的薄膜厚度约为710 nm。
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Some Structural and Optical Properties of sprayed Iron Oxide Thin films
In this paper α-Fe2O3, thin films were prepared by spray pyrolysis technique via spraying FeCl3·6H2O (10 -2 M) based aqueous solution with a spray flow of 8 ml/min onto heated glass substrates at 350 °C. After deposition, rust red and amorphous films was obtained. After a heat treatment at 400 ° C for six hours, the thin films are well crystallized. In order to study the surface morphology of the films and their crystalline structure, an electron scanning microscope (SEM) and X-ray diffraction were used (XRD). A UV-Vis-NIR spectrophotometer in the wavelength range 200–2500 nm was used to carry out the transmittance and the reflectance of the iron oxide films. The study of the optical properties of the iron oxide thin films was completed by the data acquired using a variable angle spectroscopic ellipsometer in the range 400–1800 nm of wavelength. The results reveal that the sprayed thin films were amorphous and after the heat treatment, the films crystallize in the α-Fe2O3 phase. SEM images show compact and homogeneous films, the estimated optical band gap for allowed direct transition of the iron oxide films was found to be 2.15 eV. On the other hand, the calculated thickness of the films from ellipsometry modeling is about 710 nm.
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