温度梯度驱动下小尺度焊料互连中微空洞形态演化与迁移的相场模拟

S. Liang, C. Ke, Min-bo Zhou, Xin-Ping Zhang
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引用次数: 1

摘要

热迁移问题由于在热流的驱动下原子的迁移而引起焊料互连的破坏,引起了人们越来越多的关注。此外,热迁移不仅会促进微空洞的形成,还会诱发许多其他类型的微空洞在焊点互连中的演化和迁移,导致焊点互连的完整性丧失,可靠性急剧下降,特别是在高温梯度下的焊点互连。本文建立了一种相场模型,用于模拟温度梯度下焊料互连中微空洞的演化和迁移行为。仿真考虑了表面扩散和温度梯度的耦合效应,验证了该方法的可行性和有效性。结果表明:在微尺度下,对于含有初始圆形空洞的焊料互连,微空洞沿温度梯度向冷区迁移;此外,在较高的温度梯度下,微空洞迁移速度加快,其形状变得不稳定,这将增加焊料互连失效的可能性。此外,温度梯度可以驱动两个微孔迁移并聚集成一个大的微孔,最终形成一个裂隙状的微孔。最后,对微孔隙迁移动力学进行了研究,结果与解析解一致。
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Phase field simulation of morphological evolution and migration of the microvoid in small scale solder interconnects driven by temperature gradient
Thermomigration issue has attracted increasing attention as it can induce the failure of solder interconnects, owing to the migration of atoms driven by heat flux. Further, thermomigration can promote the formation of microvoids, and also induces the evolution and migration of many other types of microvoids in solder interconnects, resulting in loss of the integrity of solder interconnects and a dramatic decrease of the reliability, in particular for the solder interconnects under high temperature gradient. In this paper, a phase field model is developed and employed to simulate the evolution and migration behavior of microvoids in solder interconnects under the applied temperature gradient. Simulations take into account the coupled effect of surface diffusion and temperature gradient, and the feasibility and validity of this method are confirmed. The results show that for the solder interconnect containing an initially circular void in microscale, the microvoid migrates to the cold regions along the temperature gradient. In addition, under a higher temperature gradient, the microvoid migrates with higher speed and its shape becomes unstable, which will increase the potential of failure in solder interconnects. Moreover, the temperature gradient can drive two microvoids to migrate and coalesce to a large micorvoid, and eventually a slit-like void is formed. Finally, the microvoid migration kinetics is also investigated, and the result is consistent with the analytical solution.
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