柔性顶部金属结构,提高超低k可靠性

K. Cheng, C. Teng, H. Y. Huang, H. C. Chen, C. Shih, T. H. Liu, C. Tsai, C. W. Lu, Y. H. Wu, H. Lee, M. H. Lee, M. Hsieh, B. Lin, S. Hou, C. J. Lee, H. H. Lu, T. Bao, S. Shue, C. H. Yu
{"title":"柔性顶部金属结构,提高超低k可靠性","authors":"K. Cheng, C. Teng, H. Y. Huang, H. C. Chen, C. Shih, T. H. Liu, C. Tsai, C. W. Lu, Y. H. Wu, H. Lee, M. H. Lee, M. Hsieh, B. Lin, S. Hou, C. J. Lee, H. H. Lu, T. Bao, S. Shue, C. H. Yu","doi":"10.1109/IITC-MAM.2015.7325587","DOIUrl":null,"url":null,"abstract":"High stresses generated from chip-package interactions (CPI), especially when large die is flip mounted on organic substrate using Pb-free C4 bumps, can easily cause low-k delamination. A novel scheme by applying an elastic material can effectively reduce the transmitted stresses and, thus, resolve the interfacial delamination issue. Along with an optimized chip-package integration solution, a reliable interconnect structure with good electrical performance, has been successfully demonstrated.","PeriodicalId":6514,"journal":{"name":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","volume":"26 1","pages":"303-306"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A flexible top metal structure to improve ultra low-k reliability\",\"authors\":\"K. Cheng, C. Teng, H. Y. Huang, H. C. Chen, C. Shih, T. H. Liu, C. Tsai, C. W. Lu, Y. H. Wu, H. Lee, M. H. Lee, M. Hsieh, B. Lin, S. Hou, C. J. Lee, H. H. Lu, T. Bao, S. Shue, C. H. Yu\",\"doi\":\"10.1109/IITC-MAM.2015.7325587\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"High stresses generated from chip-package interactions (CPI), especially when large die is flip mounted on organic substrate using Pb-free C4 bumps, can easily cause low-k delamination. A novel scheme by applying an elastic material can effectively reduce the transmitted stresses and, thus, resolve the interfacial delamination issue. Along with an optimized chip-package integration solution, a reliable interconnect structure with good electrical performance, has been successfully demonstrated.\",\"PeriodicalId\":6514,\"journal\":{\"name\":\"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)\",\"volume\":\"26 1\",\"pages\":\"303-306\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IITC-MAM.2015.7325587\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC-MAM.2015.7325587","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

芯片封装相互作用(CPI)产生的高应力,特别是当使用无铅C4凸块翻转安装在有机基板上时,很容易导致低k分层。一种采用弹性材料的新方案可以有效地降低传递应力,从而解决界面分层问题。在优化的芯片封装集成方案的基础上,成功地展示了具有良好电性能的可靠互连结构。
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A flexible top metal structure to improve ultra low-k reliability
High stresses generated from chip-package interactions (CPI), especially when large die is flip mounted on organic substrate using Pb-free C4 bumps, can easily cause low-k delamination. A novel scheme by applying an elastic material can effectively reduce the transmitted stresses and, thus, resolve the interfacial delamination issue. Along with an optimized chip-package integration solution, a reliable interconnect structure with good electrical performance, has been successfully demonstrated.
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High-voltage monolithic 3D capacitors based on through-silicon-via technology Wafer level metallic bonding: Voiding mechanisms in copper layers A flexible top metal structure to improve ultra low-k reliability Nanostructured material formation for beyond Si devices Ni silicides formation: Use of Ge and Pt to study the diffusing species, lateral growth and relaxation mechanisms
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