涂层共价陶瓷的热腐蚀行为

G. Davies, T. M. Holmes, O. Gregory
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引用次数: 8

摘要

陶瓷薄膜沉积在热压氮化硅和碳化硅衬底上,为底层材料提供防腐保护。采用等离子体增强化学气相沉积和射频溅射技术制备了高纯度的氮化硅、碳化硅和氮化硅(SiO{sub 2}/Si{sub 3}N{sub 4}复合材料)涂层,形成了有效的扩散屏障,防止阳离子迁移到硅腐蚀产物中。初步结果表明,在T = 900{度}、950{度}和1000{度}C时,Na{sub 2}SO{sub 4}熔体的腐蚀程度取决于晶界相中阳离子的向外扩散和晶界相的结晶度。由于在陶瓷表面形成的保护硅膜被击穿,这些陶瓷发生了加速腐蚀。采用高纯度共价陶瓷涂层将氧化晶界相与腐蚀产物分离,降低了Na{sub 2}SO{sub 4}熔体的腐蚀速率。
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Hot corrosion behavior of coated covalent ceramics
Ceramic thin films were deposited on hot-pressed silicon nitride and silicon carbide substrates to provide corrosion protection to the underlying material. High-purity silicon nitride, silicon carbide, and silicon oxynitride (SiO{sub 2}/Si{sub 3}N{sub 4} composite) coatings were deposited by plasma-enhanced chemical vapor deposition and rf sputtering to form an effective diffusion barrier for cation migration into the silica corrosion product. Preliminary results indicated that the extent of corrosion in Na{sub 2}SO{sub 4} melts at T = 900{degree}, 950{degree}, and 1,000{degree}C was dependent on the outward diffusion of cations in the grain-boundary phase and the crystallinity of the grain-boundary phase in the uncoated ceramics. Accelerated corrosion occurred in these ceramics because of breakdown of the protective silica film formed on the surface. Corrosion rates in Na{sub 2}SO{sub 4} melts were reduced by separating the oxide grain-boundary phases from the corrosion products with high-purity covalent ceramic coatings.
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