化学浴沉积法制备ZnS和Cr-ZnS薄膜的结构和光学性能

M. Sarma
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引用次数: 3

摘要

以氨为络合剂,采用化学浴沉积法(CBD)在玻璃衬底上沉积了掺杂ZnS和Cr的ZnS薄膜。在70℃的温度下,溶液的pH值保持在8 ~ 9。采用x射线衍射仪(XRD)、x射线荧光光谱仪(XRFS)和原子力显微镜(AFM)对ZnS和cr掺杂ZnS薄膜进行了表征。观察了掺杂和未掺杂薄膜的结构特性和光吸收。晶粒尺寸、晶格常数、微应变、位错密度等参数;通过XRD和吸光光谱分别测定了两种薄膜的消光系数、吸收系数等光学常数。研究表明,掺杂cr的ZnS薄膜在420 nm处晶体尺寸增大,可见光区光学性能良好。
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Structural and Optical Properties of ZnS and Cr-ZnS Thin Films Prepared by Chemical Bath Deposition Method
Thin films of ZnS and Cr doped ZnS have been deposited on glass substrates by chemical bath deposition (CBD) method taking ammonia as complexing agent. The pH of the solution was maintained at 8−9 at a temperature of 70 oC. Characterization of the ZnS and Cr-doped ZnS films were carried out using X-ray diffraction (XRD), X-ray Fluorescence Spectrograph (XRFS) and Atomic force microscopy (AFM). Structural properties and optical absorption has been observed for both doped and undoped films. Parameters like crystallite size, lattice constant, microstrain, dislocation density; and optical constants such as extinction coefficient, absorption coefficient for both types of films were measured from XRD and absorbance spectra respectively. Studies show that there is an increase of crystallite size and good optical properties in visible region from 420 nm in Cr-doped ZnS thin film.
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