{"title":"沉积温度对射频磁控溅射制备碲化镉薄膜的影响","authors":"M. Aliyu, N. Amin","doi":"10.1109/POWERAFRICA.2017.7991228","DOIUrl":null,"url":null,"abstract":"CdTe-based thin film solar cells have shown strong potentials as viable thin film solar cells for the future, due to several attractive material properties. Its direct bandgap, strong absorption coefficient, ease and multiple deposition methods have favored this material in solar cell research and manufacturing. However, the quality of these thin films, depend on the method and process of fabrication. Among the important issues considered for cheaper and more efficient solar cells is the deposition temperature. In this work, CdTe thin films were deposited on glass using RF magnetron sputtering at various temperatures and their structural, optical and electrical characteristics analyzed using SEM, AFM, XRD, and UV-Vis. Results show that grains sizes are not significantly affected for films deposited at 350oC and below. At 400oC however, the grains show remarkable increase in size, while crystallinity is increased with higher deposition temperature. The energy bandgap show gradual increase with temperature, ranging from 1.43–1.54 eV. Overall, this work show that higher deposition temperature is desirable in the fabrication of good quality CdTe films for solar cell applications.","PeriodicalId":6601,"journal":{"name":"2017 IEEE PES PowerAfrica","volume":"43 1","pages":"227-230"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Influence of deposition temperature in the fabrication of CdTe thin films using RF magnetron sputtering\",\"authors\":\"M. Aliyu, N. Amin\",\"doi\":\"10.1109/POWERAFRICA.2017.7991228\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"CdTe-based thin film solar cells have shown strong potentials as viable thin film solar cells for the future, due to several attractive material properties. Its direct bandgap, strong absorption coefficient, ease and multiple deposition methods have favored this material in solar cell research and manufacturing. However, the quality of these thin films, depend on the method and process of fabrication. Among the important issues considered for cheaper and more efficient solar cells is the deposition temperature. In this work, CdTe thin films were deposited on glass using RF magnetron sputtering at various temperatures and their structural, optical and electrical characteristics analyzed using SEM, AFM, XRD, and UV-Vis. Results show that grains sizes are not significantly affected for films deposited at 350oC and below. At 400oC however, the grains show remarkable increase in size, while crystallinity is increased with higher deposition temperature. The energy bandgap show gradual increase with temperature, ranging from 1.43–1.54 eV. Overall, this work show that higher deposition temperature is desirable in the fabrication of good quality CdTe films for solar cell applications.\",\"PeriodicalId\":6601,\"journal\":{\"name\":\"2017 IEEE PES PowerAfrica\",\"volume\":\"43 1\",\"pages\":\"227-230\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE PES PowerAfrica\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/POWERAFRICA.2017.7991228\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE PES PowerAfrica","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/POWERAFRICA.2017.7991228","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Influence of deposition temperature in the fabrication of CdTe thin films using RF magnetron sputtering
CdTe-based thin film solar cells have shown strong potentials as viable thin film solar cells for the future, due to several attractive material properties. Its direct bandgap, strong absorption coefficient, ease and multiple deposition methods have favored this material in solar cell research and manufacturing. However, the quality of these thin films, depend on the method and process of fabrication. Among the important issues considered for cheaper and more efficient solar cells is the deposition temperature. In this work, CdTe thin films were deposited on glass using RF magnetron sputtering at various temperatures and their structural, optical and electrical characteristics analyzed using SEM, AFM, XRD, and UV-Vis. Results show that grains sizes are not significantly affected for films deposited at 350oC and below. At 400oC however, the grains show remarkable increase in size, while crystallinity is increased with higher deposition temperature. The energy bandgap show gradual increase with temperature, ranging from 1.43–1.54 eV. Overall, this work show that higher deposition temperature is desirable in the fabrication of good quality CdTe films for solar cell applications.