聚焦离子束蚀刻环形谐振腔在cvd生长的Ge-Sb-S薄膜中

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics Pub Date : 2009-10-30 DOI:10.1109/CLEOPR.2009.5292465

C. C. Huang, Y. Ho, K. Knight, J. Rarity, D. Hewak

{"title":"聚焦离子束蚀刻环形谐振腔在cvd生长的Ge-Sb-S薄膜中","authors":"C. C. Huang, Y. Ho, K. Knight, J. Rarity, D. Hewak","doi":"10.1109/CLEOPR.2009.5292465","DOIUrl":null,"url":null,"abstract":"Focused ion beam technique has been applied to fabricate ring resonators in Ge-Sb-S thin films for optoelectronic applications. The CVD-grown Ge-Sb-S thin films have been characterizatezed by micro-Raman, scanning electron microscopy, energy dispersive X-ray analysis and UV-VIS-NIR spectroscopy and the properties of the resonator are being assessed.","PeriodicalId":6452,"journal":{"name":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Focused ion beam etched ring-resonator in CVD-grown Ge-Sb-S thin films\",\"authors\":\"C. C. Huang, Y. Ho, K. Knight, J. Rarity, D. Hewak\",\"doi\":\"10.1109/CLEOPR.2009.5292465\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Focused ion beam technique has been applied to fabricate ring resonators in Ge-Sb-S thin films for optoelectronic applications. The CVD-grown Ge-Sb-S thin films have been characterizatezed by micro-Raman, scanning electron microscopy, energy dispersive X-ray analysis and UV-VIS-NIR spectroscopy and the properties of the resonator are being assessed.\",\"PeriodicalId\":6452,\"journal\":{\"name\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"volume\":\"1 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOPR.2009.5292465\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2009.5292465","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

聚焦离子束技术已被应用于锗锑硫薄膜的环形谐振器的制造。利用微拉曼、扫描电镜、能量色散x射线和紫外-可见-近红外光谱对cvd生长的Ge-Sb-S薄膜进行了表征，并对谐振腔的性能进行了评价。

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Focused ion beam etched ring-resonator in CVD-grown Ge-Sb-S thin films

Focused ion beam technique has been applied to fabricate ring resonators in Ge-Sb-S thin films for optoelectronic applications. The CVD-grown Ge-Sb-S thin films have been characterizatezed by micro-Raman, scanning electron microscopy, energy dispersive X-ray analysis and UV-VIS-NIR spectroscopy and the properties of the resonator are being assessed.

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2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics

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