n型多晶硅中富金属活性析出物的解析与工程重组

A. Morishige, D. Fenning, J. Hofstetter, M. Ann Jensen, S. Ramanathan, Chenlei Wang, B. Lai, T. Buonassisi
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引用次数: 5

摘要

基于n型冶金级多晶硅(mc-Si)衬底的太阳能电池可能是降低光伏发电每瓦成本的一条有前途的途径。金属点缺陷在n型和p型硅中的有害影响是已知的,但金属硅化物沉淀的复合活性,特别是在n型mc-Si中,仍然没有很好地建立,阻碍了建模和工艺优化的努力。在这一贡献中,我们提供了一个基本原理,为什么富金属沉淀可能会限制n型mc-Si的少数载流子寿命,而不是生长的p型mc-Si,主要是金属点缺陷。利用μ-XRF,我们在角砖的n型晶圆低寿命“红区”区域沿复合活跃晶界发现了富金属析出物。为了降低沉淀金属的浓度,我们对晶圆片进行了磷扩散。晶界仍保持复合活性,这可能是由于点缺陷的不完全吸尽和复合活性富金属析出相的溶解。
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Elucidating and engineering recombination-active metal-rich precipitates in n-type multicrystalline silicon
Solar cells based on n-type upgraded metallurgical grade multicrystalline silicon (mc-Si) substrates may be a promising path for reducing the cost per watt of photovoltaics. The detrimental effect of metal point defects in both n- and p-type silicon is known, but the recombination activity of metal-silicide precipitates, especially in n-type mc-Si, is still not well established, impeding modeling and process optimization efforts. In this contribution, we provide a rationale for why metal-rich precipitates may limit minority-carrier lifetime in n-type mc-Si, in contrast to as-grown p-type mc-Si, which is dominated by metal point defects. Using μ-XRF, we identify metal-rich precipitates along a recombination active grain boundary in the low-lifetime “red zone” region of n-type wafers from a corner brick. To reduce the concentration of precipitated metals, we phosphorus-diffuse the wafers. Grain boundaries remain recombination active, which may be attributed to incomplete gettering of point defects and dissolution of recombination-active metal-rich precipitates.
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