{"title":"基于太赫兹技术的指纹传感器成型厚度无损测量","authors":"Longhai Liu, Haitao Jiang, Ying Wang, Qinghua Shou, Jianhua Xie, Yaqi Lu","doi":"10.1109/CSTIC.2017.7919842","DOIUrl":null,"url":null,"abstract":"Fingerprint sensor (FPS) becomes rapidly popular due to small size and high safety. The molding thickness of capacitive FPS will affect its performance and needs to be accurately measured and controlled. Different from cutting and laser drilling method, one none destructive method with Terahertz electromagnetic wave is introduced. Terahertz wave can penetrate into the molding package materials. The molding thickness can be measured through time delay of two pulse Terahertz waves. The measured thickness is correlated with microscope view and the result is within ±4um gap.","PeriodicalId":6846,"journal":{"name":"2017 China Semiconductor Technology International Conference (CSTIC)","volume":"84 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2017-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Finger print sensor molding thickness none destructive measurement with Terahertz technology\",\"authors\":\"Longhai Liu, Haitao Jiang, Ying Wang, Qinghua Shou, Jianhua Xie, Yaqi Lu\",\"doi\":\"10.1109/CSTIC.2017.7919842\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fingerprint sensor (FPS) becomes rapidly popular due to small size and high safety. The molding thickness of capacitive FPS will affect its performance and needs to be accurately measured and controlled. Different from cutting and laser drilling method, one none destructive method with Terahertz electromagnetic wave is introduced. Terahertz wave can penetrate into the molding package materials. The molding thickness can be measured through time delay of two pulse Terahertz waves. The measured thickness is correlated with microscope view and the result is within ±4um gap.\",\"PeriodicalId\":6846,\"journal\":{\"name\":\"2017 China Semiconductor Technology International Conference (CSTIC)\",\"volume\":\"84 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-03-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 China Semiconductor Technology International Conference (CSTIC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CSTIC.2017.7919842\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 China Semiconductor Technology International Conference (CSTIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2017.7919842","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fingerprint sensor (FPS) becomes rapidly popular due to small size and high safety. The molding thickness of capacitive FPS will affect its performance and needs to be accurately measured and controlled. Different from cutting and laser drilling method, one none destructive method with Terahertz electromagnetic wave is introduced. Terahertz wave can penetrate into the molding package materials. The molding thickness can be measured through time delay of two pulse Terahertz waves. The measured thickness is correlated with microscope view and the result is within ±4um gap.
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