{"title":"真空热处理对Sb2S3薄膜结构和光学性能的影响","authors":"N. Țigău, S. Condurache-Bota","doi":"10.1109/SMICND.2014.6966395","DOIUrl":null,"url":null,"abstract":"In this work, the effect of the thermal annealing on the structural and optical properties of antimony trisulfide (Sb<sub>2</sub>S<sub>3</sub>) thin films deposited by thermal evaporation onto glass substrates held at 293 K was studied. Sb<sub>2</sub>S<sub>3</sub> thin films were annealed at 500 K for 1 h in vacuum. Their structural properties have studied by transmission electron microscopy (TEM). The TEM analysis showed that the as-deposited Sb<sub>2</sub>S<sub>3</sub> thin films have been an amorphous structure, while after annealing treatment, they become polycrystalline in structure. The optical constants of Sb<sub>2</sub>S<sub>3</sub> thin films as refractive index, n, and absorption coefficient, α, were obtained from the analysis of the experimental recorded spectral transmission data over the wavelength range of 500-1400 nm. From the photon energy dependence of absorption coefficient, the optical band gap energy, E<sub>g</sub>, was calculated for both the as-deposited and annealed Sb<sub>2</sub>S<sub>3</sub> thin films.","PeriodicalId":6616,"journal":{"name":"2014 International Semiconductor Conference (CAS)","volume":"30 1","pages":"73-76"},"PeriodicalIF":0.0000,"publicationDate":"2014-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Effect of thermal annealing in vacuum on the structural and optical properties of Sb2S3 thin films\",\"authors\":\"N. Țigău, S. Condurache-Bota\",\"doi\":\"10.1109/SMICND.2014.6966395\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, the effect of the thermal annealing on the structural and optical properties of antimony trisulfide (Sb<sub>2</sub>S<sub>3</sub>) thin films deposited by thermal evaporation onto glass substrates held at 293 K was studied. Sb<sub>2</sub>S<sub>3</sub> thin films were annealed at 500 K for 1 h in vacuum. Their structural properties have studied by transmission electron microscopy (TEM). The TEM analysis showed that the as-deposited Sb<sub>2</sub>S<sub>3</sub> thin films have been an amorphous structure, while after annealing treatment, they become polycrystalline in structure. The optical constants of Sb<sub>2</sub>S<sub>3</sub> thin films as refractive index, n, and absorption coefficient, α, were obtained from the analysis of the experimental recorded spectral transmission data over the wavelength range of 500-1400 nm. From the photon energy dependence of absorption coefficient, the optical band gap energy, E<sub>g</sub>, was calculated for both the as-deposited and annealed Sb<sub>2</sub>S<sub>3</sub> thin films.\",\"PeriodicalId\":6616,\"journal\":{\"name\":\"2014 International Semiconductor Conference (CAS)\",\"volume\":\"30 1\",\"pages\":\"73-76\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 International Semiconductor Conference (CAS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2014.6966395\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 International Semiconductor Conference (CAS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2014.6966395","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Effect of thermal annealing in vacuum on the structural and optical properties of Sb2S3 thin films
In this work, the effect of the thermal annealing on the structural and optical properties of antimony trisulfide (Sb2S3) thin films deposited by thermal evaporation onto glass substrates held at 293 K was studied. Sb2S3 thin films were annealed at 500 K for 1 h in vacuum. Their structural properties have studied by transmission electron microscopy (TEM). The TEM analysis showed that the as-deposited Sb2S3 thin films have been an amorphous structure, while after annealing treatment, they become polycrystalline in structure. The optical constants of Sb2S3 thin films as refractive index, n, and absorption coefficient, α, were obtained from the analysis of the experimental recorded spectral transmission data over the wavelength range of 500-1400 nm. From the photon energy dependence of absorption coefficient, the optical band gap energy, Eg, was calculated for both the as-deposited and annealed Sb2S3 thin films.