工业纯钛溅射蚀刻精细凸点的形成

IF 0.5 4区材料科学 Q4 METALLURGY & METALLURGICAL ENGINEERING Journal of The Japan Institute of Metals Pub Date : 2017-01-01 DOI:10.2320/JINSTMET.J2016064

K. Nakasa, A. Yamamoto, T. Kubo, Rongguang Wang, T. Sumomogi

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引用次数: 2

摘要

1日本广岛国学大学高新技术研究中心，日本广岛73903217390321广岛工业大学工程学院机械系统工程系，广岛731-5193广岛国新学院工程学院制造工程系，广岛7390321

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Formation of Fine Protrusions by Sputter Etching of Commercially Pure Titanium

1High-Tech Research Center, Hiroshima Kokusai Gakuin University, Hiroshima 7390321 2Asahi Surface Tec. LLC, Higashi-Hiroshima 7390024 3Center for General Education, Hiroshima Kokusai Gakuin University, Hiroshima 7390321 4Department of Mechanical System Engineering, Faculty of Engineering, Hiroshima Institute of Technology, Hiroshima 731-5193 5Department of Manufacturing Engineering, Faculty of Engineering, Hiroshima Kokusai Gakuin University, Hiroshima 7390321

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