投影双光子光刻技术在微结构印刷中的最小化收缩

IF 1 Q4 ENGINEERING, MANUFACTURING Journal of Micro and Nano-Manufacturing Pub Date : 2022-06-27 DOI:10.1115/msec2022-86076
Harnjoo Kim, S. Saha
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引用次数: 1

摘要

双光子光刻(TPL)是一种基于光聚合的增材制造技术,能够制造具有亚微米特征的复杂3D结构。投影TPL (P-TPL)是一种特定的实现,它利用基于投影的并行化来将打印速率提高三个数量级。然而,P-TPL的一个实际限制是印刷微结构的高收缩率,这是由印刷部件中相对较低的聚合程度引起的。与传统的立体光刻(SLA)方法和传统的TPL不同,P-TPL中的大部分聚合都是在关闭光源的情况下通过暗反应进行的,因此聚合程度较低。在本研究中,我们实证研究了P-TPL过程中影响收缩的参数。我们观察到,收缩随着激光曝光时间的增加和层间距的减小而减少。为了扩大设计空间,我们探索了一种光化学后处理技术,包括使用紫外线进一步固化印刷结构,同时将其浸入光引发剂溶液中。通过这种后处理,我们能够在不限制几何设计空间的情况下将面积收缩率从45%以上减少到1%。这表明,与传统串行TPL相比,P-TPL可以实现高尺寸精度,同时利用高吞吐量。此外,P-TPL在相似收缩率下具有比传统SLA打印更高的分辨率。
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Minimizing Shrinkage in Microstructures Printed With Projection Two-Photon Lithography
Two-photon lithography (TPL) is a photopolymerization-based additive manufacturing technique capable of fabricating complex 3D structures with submicron features. Projection TPL (P-TPL) is a specific implementation that leverages projection-based parallelization to increase the rate of printing by three orders of magnitude. However, a practical limitation of P-TPL is the high shrinkage of the printed microstructures that is caused by the relatively low degree of polymerization in the as-printed parts. Unlike traditional stereolithography (SLA) methods and conventional TPL, most of the polymerization in P-TPL occurs through dark reactions while the light source is off, thereby resulting in a lower degree of polymerization. In this study, we empirically investigated the parameters of the P-TPL process that affect shrinkage. We observed that the shrinkage reduces with an increase in the duration of laser exposure and with a reduction of layer spacing. To broaden the design space, we explored a photochemical post-processing technique that involves further curing the printed structures using UV light while submerging them in a solution of a photoinitiator. With this post-processing, we were able to reduce the areal shrinkage from more than 45% to 1% without limiting the geometric design space. This shows that P-TPL can achieve high dimensional accuracy while taking advantage of the high throughput when compared to conventional serial TPL. Furthermore, P-TPL has a higher resolution when compared to the conventional SLA prints at a similar shrinkage rate.
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来源期刊
Journal of Micro and Nano-Manufacturing
Journal of Micro and Nano-Manufacturing ENGINEERING, MANUFACTURING-
CiteScore
2.70
自引率
0.00%
发文量
12
期刊介绍: The Journal of Micro and Nano-Manufacturing provides a forum for the rapid dissemination of original theoretical and applied research in the areas of micro- and nano-manufacturing that are related to process innovation, accuracy, and precision, throughput enhancement, material utilization, compact equipment development, environmental and life-cycle analysis, and predictive modeling of manufacturing processes with feature sizes less than one hundred micrometers. Papers addressing special needs in emerging areas, such as biomedical devices, drug manufacturing, water and energy, are also encouraged. Areas of interest including, but not limited to: Unit micro- and nano-manufacturing processes; Hybrid manufacturing processes combining bottom-up and top-down processes; Hybrid manufacturing processes utilizing various energy sources (optical, mechanical, electrical, solar, etc.) to achieve multi-scale features and resolution; High-throughput micro- and nano-manufacturing processes; Equipment development; Predictive modeling and simulation of materials and/or systems enabling point-of-need or scaled-up micro- and nano-manufacturing; Metrology at the micro- and nano-scales over large areas; Sensors and sensor integration; Design algorithms for multi-scale manufacturing; Life cycle analysis; Logistics and material handling related to micro- and nano-manufacturing.
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