Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide
{"title":"使用超高近场同轴尖端制造和测量","authors":"Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide","doi":"10.1109/MWSYM.2005.1517174","DOIUrl":null,"url":null,"abstract":"We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.","PeriodicalId":13133,"journal":{"name":"IEEE MTT-S International Microwave Symposium Digest, 2005.","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2005-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication and measurements using ultra-tall near-field coaxial tips\",\"authors\":\"Yaqiang Wang, C. A. Paulson, Guoqing Ning, D. W. van der Weide\",\"doi\":\"10.1109/MWSYM.2005.1517174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.\",\"PeriodicalId\":13133,\"journal\":{\"name\":\"IEEE MTT-S International Microwave Symposium Digest, 2005.\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE MTT-S International Microwave Symposium Digest, 2005.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSYM.2005.1517174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE MTT-S International Microwave Symposium Digest, 2005.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2005.1517174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication and measurements using ultra-tall near-field coaxial tips
We present a new method for microfabrication of coaxial silicon tips with heights >50 /spl mu/m. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.
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