基于ZnO纳米棒的氢传感器

B. Mondal, S. Hungyo, C. Roychaudhury, H. Saha
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引用次数: 1

摘要

本文报道了一种简单的化学方法制备氧化锌纳米棒H2传感器。在Si衬底上沉积ZnO薄膜,然后退火,用于探测氢。利用扫描电子显微镜(SEM)和x射线衍射仪(XRD)对制备的ZnO体系的表面形貌和晶体结构进行了表征。采用电流-电压测量方法研究了干燥空气中浓度范围为0.1-1 vol %的H2的气敏特性。讨论了气敏机理。
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ZnO nano-rod based hydrogen sensor
We report on the fabrication of Zinc Oxide (ZnO) nanorod based H2 sensor using a simple chemical route. ZnO films were deposited on Si substrate followed by annealing and used to detect hydrogen. The surface morphology and crystal structure of the fabricated ZnO system was investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The gas sensing of H2 in the concentration range 0.1-1 vol % in dry air was studied using current-voltage measurements. Gas sensing mechanism is discussed.
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