N40 256K×44嵌入式RRAM宏与sl预充SA和低压限流器,以提高读写性能

Chung-Cheng Chou, Zheng-Jun Lin, P. Tseng, Chih-Feng Li, Chih-Yang Chang, Wei-Chih Chen, Y. Chih, T. Chang
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引用次数: 83

摘要

由于RRAM元件(RE)的简单性及其与逻辑过程的兼容性,RRAM是嵌入式应用中具有吸引力和低成本的存储结构。RRAM位单元(图30.1.1)由NMOS选择晶体管和双极RE组成,双极RE由底部电极(BE)、过渡金属氧化物锉(Hi-K)、金属覆盖层和顶部电极(TE)组成。存储单元作为一个三端设备工作,包括位线(BL)、源线(SL)和字线(WL)。BL接TE, SL接被选晶体管的源节点,字线(WL)接被选晶体管的栅极。在这项工作中采用了公共SL (CSL)体系结构。CSL允许两个或多个列共享一个源行。这样可以减少SL的列mux数,从而节省宏面积。此外,由于减少了SL数量,SL可以使用更宽的金属轨道来实现。因此,也可以降低SL电阻。然而,CSL架构会导致SL上较大的寄生电容。本文提出了一种SL预充电方案来处理从CSL读取时增加的电容。
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An N40 256K×44 embedded RRAM macro with SL-precharge SA and low-voltage current limiter to improve read and write performance
RRAM is an attractive and low-cost memory structure for embedded applications due to the simplicity of the RRAM element (RE) and its compatibility with a logic process. A RRAM bit cell (Fig. 30.1.1) consists of an NMOS select transistor and a bipolar RE, which consists of a bottom electrode (BE), a transition metal-oxide file (Hi-K), a metal capping layer and a top electrode (TE). The memory cell operates as a 3-terminal device, including bit-line (BL), source-line (SL) and word-line (WL). BL is connecting to TE, SL is connecting to the source node of the select transistor and word-line (WL) is connecting to the gate of the select transistor. A common SL (CSL) architecture is adopted in this work. CSL allows two or more columns to share one source line. So that the column mux number for SL can be reduced, therefore macro area can be saved. In addition, SL can be implemented with a wider metal track due to the reduced SL count. Therefore, the SL resistance also can be reduced. However, a CSL architecture will result in a larger parasitic capacitance on SL. This paper presents an SL precharge scheme to deal this increased capacitance when reading from the CSL.
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