{"title":"微波驱动低功率放电CPW微等离子体发生器","authors":"Z. V. Missen, A. Semnani, D. Peroulis","doi":"10.1109/IMWS-AMP.2018.8457137","DOIUrl":null,"url":null,"abstract":"A novel microplasma generator based on a halfwavelength grounded coplanar waveguide is introduced. Design theory and considerations as well as simulation results are presented. Measured results of a fabricated circuit are compared with simulations. Sustained microplasma glow discharges are achieved in sub-atmospheric pressure argon with sustained input powers of less than 400 mW. The excitation frequency dependence of the discharge location is also investigated, and its implication for future designs is discussed.","PeriodicalId":6605,"journal":{"name":"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","volume":"31 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2018-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Microwave-Driven CPW Microplasma Generator for Low-Power Discharge\",\"authors\":\"Z. V. Missen, A. Semnani, D. Peroulis\",\"doi\":\"10.1109/IMWS-AMP.2018.8457137\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel microplasma generator based on a halfwavelength grounded coplanar waveguide is introduced. Design theory and considerations as well as simulation results are presented. Measured results of a fabricated circuit are compared with simulations. Sustained microplasma glow discharges are achieved in sub-atmospheric pressure argon with sustained input powers of less than 400 mW. The excitation frequency dependence of the discharge location is also investigated, and its implication for future designs is discussed.\",\"PeriodicalId\":6605,\"journal\":{\"name\":\"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)\",\"volume\":\"31 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IMWS-AMP.2018.8457137\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMWS-AMP.2018.8457137","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microwave-Driven CPW Microplasma Generator for Low-Power Discharge
A novel microplasma generator based on a halfwavelength grounded coplanar waveguide is introduced. Design theory and considerations as well as simulation results are presented. Measured results of a fabricated circuit are compared with simulations. Sustained microplasma glow discharges are achieved in sub-atmospheric pressure argon with sustained input powers of less than 400 mW. The excitation frequency dependence of the discharge location is also investigated, and its implication for future designs is discussed.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
