在langasite上制备saw的一些工艺和封装问题

N. Dumbravescu, V. Buiculescu
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引用次数: 0

摘要

本文介绍了在langasite衬底上制备表面声波(SAW)时遇到的一些问题。虽然所有的设备都通过了光学检查,但第一次电气测试的结果与我们的预期不符。随后对有缺陷的设备进行了拆解,并寻找故障原因。我们发现了几个这样的机制,在修复它们之后,我们封装并再次测试了这些设备。现在,所有设备都运行正常。给出了故障修复前后的电气试验对比结果。
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Some technological and encapsulation issues of SAWS manufactured on langasite
This paper presents some aspects encountered in fabrication of surface acoustic wave (SAW) manufactured on langasite substrate. Results obtained after the first electrical test didn't correspond to our expectations, although all devices passed through on optical inspection. It followed the de-capsulation of defective devices and the searching for failure causes. We detected several such mechanisms and after fixing them, we encapsulated and tested again the devices. Now, all devices were functioning properly. Comparative results of electrical test (before and after fixing the failure) are given.
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