大海捞针:纳米电子器件的分析与可靠性

M. Radhakrishnan
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摘要

随着器件技术从纳米级向原子级发展,50年前理查德·费曼(Richard Feynman)的著名论断“底部有足够的空间”(There is plenty of room at the bottom)需要仔细研究和详细理解。这必须与一家领先的设备制造商的评论“在底部附近有很多困难”一起看待。为什么观察结果会有这种差异?
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Search of a needle in Haystack : Analysis and reliability of nanoelectronic devices
As the device technology is progressing from nanometer level towards atomic scale, the famous comment “There is plenty of room at the bottom” by Richard Feynman [1] 50 years ago needs to be studied carefully and understood in detail. This has to be viewed alongwith the comment by a leading device manufacturer “There is plenty of difficulty near the bottom” [2]. Why this discrepancy in observations?
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