实验条件对氢氧化铵溶胶-凝胶沉积法制备氧化锌薄膜性能的影响

Wannes Hb, Zaghouania Br, W. Dimassia
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引用次数: 1

摘要

本文报道了以氢氧化铵为添加剂,采用溶胶-凝胶自旋镀膜技术制备未掺杂氧化锌薄膜的研究。分析了前驱体浓度和退火温度对制备薄膜光学性能和结构性能的影响;我们将前驱体浓度从0.1M改变为0.2 M,退火温度从400℃改变为500℃,步骤分别为0.1M和100℃。x射线衍射(XRD)结果表明,ZnO薄膜为六边形结构的多晶,从衬底表面沿a轴(100)和c轴(002)方向优先生长。制备的薄膜在400 ~ 2000 nm光谱范围内具有较高的透明度(75%以上)。制备的ZnO薄膜的光学带隙能值在3.22 eV左右。室温光致发光以378nm左右的强发光峰和477nm左右的低强度发光峰为主。
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Effect of Experimental Condition on Properties of Zinc Oxide Films Prepared by Sol-Gel Deposition with Ammonium Hydroxide as an Additive
In this work, we report on the study of undoped zinc oxide (ZnO) thin films prepared by sol-gel spin coating technique using the ammonium hydroxide as an additive. The effect of the precursor concentration and the annealing temperature on the optical and structural properties of the produced films is analyzed; we changed the precursor concentration and the annealing temperature from 0.1 M to 0.2 M and 400°C to 500°C with steps of 0.1M and 100°C, respectively. X-ray diffraction (XRD) results show that ZnO thin films are polycrystalline with a hexagonal structure and preferred growth orientations along the a-axis (100) and c-axis (002) from the substrate surface. The elaborated films have shown a high transparency (more than 75%) in the spectral range from 400 nm to 2000 nm. The optical band gap energy values of the ZnO thin films elaborated are located around 3.22 eV. Room temperature photoluminescence is dominated by a strong luminescence peak around 378 nm and a low-intensity peak around 477 nm.
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