用于光伏材料表征的宽带椭圆偏振光谱

F.A. Abou-Elfotouh, G.S. Horner, T.J. Coutts, M.W. Wanlass
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引用次数: 11

摘要

商用光谱椭圆计(SE)的可用性限制在250-900 nm的紫外可见范围内。虽然这对许多应用都很有用,但为了研究大多数光伏材料的光学行为,它必须扩展到近红外区域(高达1700纳米)。本文讨论了宽带(300-1700 nm) SE的发展,该SE已被用于测量各种材料的光学特性。其中包括多晶薄膜材料,CuInSe2和CdTe(单晶样品也进行了研究),以及用于高效率级联太阳能电池的材料,包括InP, InGaAs和InGaAsP。这些数据中的大多数目前还无法在如此宽的光谱范围内获得。实验上,研制了一种带交流检测系统的旋转偏振片固定分析椭偏仪,用于近红外精确测量ψ和Δ相关椭偏参数。这种方法比旋转分析仪固定偏振片系统有一定的优势,包括降低对室内光的灵敏度。分析方法包括使用专门开发的计算机建模程序,该程序给出与薄膜厚度(可能是有限的或零的)和基材光学特性有关的一组给定值的ψ和Δ。
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Broad band spectroscopic ellipsometry for the characterization of photovoltaic materials

The availability of commercial spectroscopic ellipsometers (SE) has been restricted to the UV-visible range from 250–900 nm. Although this is useful for many applications, it must be extended to the near IR region (up to 1700 nm) for the study of the optical behavior of most photovoltaic materials. This paper discusses the development of a broad band (300–1700 nm) SE which has been used to measure the optical characteristics of various materials. Among these are the polycrystalline thin film materials, CuInSe2 and CdTe (for which single crystal samples have also been investigated), and materials for high efficiency cascade solar cells including InP, InGaAs and InGaAsP. Most of these data are not presently available over such a wide spectral range.

Experimentally, a rotating polarizer-fixed analyzer ellipsometer with an a.c. detection system has been developed for accurate measurement of ψ and Δ, the relevant ellipsometric parameters, in the near IR. This approach has certain advantages over the rotating analyzer-fixed polarizer systems including reduced sensitivity to room light. The analytical methods include the use of a specially developed computer modeling program which gives ψ and Δ for a given set of values related to the film thickness (which may be finite or zero) and to the optical properties of the substrate.

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