具有双面纳米锥体林的宽带抗反射石英玻璃

Yudong Yang, H. Mao, Jin Li, Meng Shi, Kewen Long, Dapeng Chen
{"title":"具有双面纳米锥体林的宽带抗反射石英玻璃","authors":"Yudong Yang, H. Mao, Jin Li, Meng Shi, Kewen Long, Dapeng Chen","doi":"10.1109/MEMS46641.2020.9056162","DOIUrl":null,"url":null,"abstract":"In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"283-286"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Broadband Antireflective Quartz Glasses with Double-Side Nanocone Forests\",\"authors\":\"Yudong Yang, H. Mao, Jin Li, Meng Shi, Kewen Long, Dapeng Chen\",\"doi\":\"10.1109/MEMS46641.2020.9056162\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems.\",\"PeriodicalId\":6776,\"journal\":{\"name\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"8 1\",\"pages\":\"283-286\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS46641.2020.9056162\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本文采用晶圆级制造技术,在石英玻璃的两侧制备了一维准有序纳米锥体组成的纳米森林,纳米锥体具有不同尺寸、直径、高度和周期的随机分布。在250nm ~ 800nm的宽波长范围内,具有这种双面纳米锥森林(nfc)的石英玻璃具有很高的抗反射性能,平均透过率达到97.5%。nfc的宽带增透特性被认为是不同波段不同尺寸的各种增透特性的累积。基于此,该石英玻璃有望在各种微光电器件和微光学成像系统中得到应用。
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Broadband Antireflective Quartz Glasses with Double-Side Nanocone Forests
In this work, nanoforests composed of one dimensional quasi-ordered nanocones are prepared on both sides of a quartz glass using a wafer-level fabrication technique, and the nanocones are randomly distributed with different dimensions, diameters, heights and periods. Such a quartz glass with these double-side nanocone forests(NCFs) shows high antireflection in a broad wavelength range from 250nm to 800nm, and an average transmittance of 97.5% is achieved. The broadband antireflection feature of the NCFs is regarded as a cumulative antireflection of various with different sizes in different bands. Based on this, it is expected such quartz glasses have applications in various micro-optoelectronic devices and micro-optical imaging systems.
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