电力器件用Cu和Al-Cu复合材料互连

Jamin Ling, Tao Xu, R. Chen, O. Valentin, C. Luechinger
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引用次数: 8

摘要

随着功率器件技术向更高的功率密度发展,器件需要更长的产品寿命,改进互连技术变得越来越重要。目前正在考虑几种替代广泛接受的铝(Al)线互连的方法。铝带由于其更高的载流能力和优越的散热能力,在特定应用中提供了性能改进的第一步,并在大批量生产中得到了验证。下一个改进级别是铝铜(Al-Cu)线或带。铝铜互连可以与标准铝模具金属化一起使用,经测试的可靠性比铝线提高4-5倍。然而,一个强大的过程尚未开发,将实现足够高的产量。性能改进的最后一级是铜(Cu)线和带。最近有报道称,铜丝键合可以将键合可靠性提高到铝丝的10倍以上。然而,在大型铜线和带状键合适合大批量生产之前,必须克服重大的技术挑战。测试表明,使用专门为铜线制作的键头进行大型铜线键合是可行的,但由于不确定是否可以获得适当的金属化模具,对生产要求的工艺评估尚未最终确定。本文探讨了铝、铝铜和铜互连技术的相对优势和挑战。结果表明,从性能和成本的角度来看,铝铜可以成为现有铝基模具金属化的一个有吸引力的解决方案。工艺研究和试验结果表明,Al-Cu的许多特征是铜键合所共有的,这使得工艺开发成为确定更具挑战性但性能更高的铜工艺的垫脚石。
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Cu and Al-Cu composite-material interconnects for power devices
As power-device technology evolves toward higher power density and devices require longer product lifespans, improving interconnect technologies becomes an increasingly important priority. Several alternatives to the widely accepted aluminum (Al) wire interconnect are being considered. Aluminum ribbon offers the first step of performance improvement in specific applications due to its higher current-carrying capacity and superior heat dissipation and is proven in high volume production. The next level of improvement is aluminum copper (Al-Cu) wire or ribbon. The Al-Cu interconnect can be used with standard Al die metallization with a tested reliability improvement of 4-5 times over Al wire. However, a robust process is yet to be developed that will achieve sufficiently high yields. The final level of performance improvement is copper (Cu) wire and ribbon. Recently it was reported that Cu wire bonding can improve bond reliability more than tenfold over Al wire. Significant technical challenges must be overcome, however, before large-Cu-wire and ribbon bonding is suitable for high-volume production. Testing shows that large-Cu-wire bonding with bond heads made specifically for Cu wire is feasible, but due to the uncertain availability of suitably metallized die, a process assessment of production requirements has not been finalized. This paper examines the relative benefits and challenges of the Al, Al-Cu and Cu interconnect technologies. The results show that Al-Cu could be an attractive solution from a performance and cost standpoint with existing Al based die metallization. Process studies and test results show that many characteristics of Al-Cu are common to Cu bonding, making the process development a stepping stone to affirming the more challenging but higher performance Cu process.
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Parasitic electrical and electromagnetic effects Heat management Passive electronic components Interconnection technology Reliability and maintainability
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