具有精确FSR控制的超高q楔形谐振器

Hansuek Lee, Tong Chen, Jiang Li, K. Yang, O. Painter, K. Vahala
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引用次数: 1

摘要

展示了Q值接近10亿的光学谐振器,在任何基于芯片的器件中是最高的。制造只使用标准的半导体工艺,实现精确的尺寸控制和微波速率自由光谱范围操作。
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Ultra-high-Q wedge resonators with precise FSR control
Optical resonators with Q values of nearly 1 billion are demonstrated, the highest for any chip-based devices. Fabrication uses only standard semiconductor processes, enabling precise size control and access to microwave-rate free-spectral-range operation.
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