{"title":"基于聚二甲基硅氧烷(PDMS)膜的气腔透镜MEMS聚焦超声换能器","authors":"Yongkui Tang, Song Liu, E. S. Kim","doi":"10.1109/MEMS46641.2020.9056313","DOIUrl":null,"url":null,"abstract":"We present a novel and easy fabrication method to manufacture Polydimethylsiloxane (PDMS) Fresnel air-cavity acoustic lens for focused ultrasonic transducers with long focal length. The process involves casting PDMS membrane with a silicon mold and bonding the PDMS membrane on a lead zirconate titanate (PZT) sheet with ultraviolet (UV)-curable adhesive. A 2.32-MHz focused ultrasonic transducer fabricated with the new method is capable of ejecting water droplets up to 1 mm in diameter (controlled by driving pulse width), from water surface 25 mm above the transducer.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"42 1","pages":"58-61"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane\",\"authors\":\"Yongkui Tang, Song Liu, E. S. Kim\",\"doi\":\"10.1109/MEMS46641.2020.9056313\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a novel and easy fabrication method to manufacture Polydimethylsiloxane (PDMS) Fresnel air-cavity acoustic lens for focused ultrasonic transducers with long focal length. The process involves casting PDMS membrane with a silicon mold and bonding the PDMS membrane on a lead zirconate titanate (PZT) sheet with ultraviolet (UV)-curable adhesive. A 2.32-MHz focused ultrasonic transducer fabricated with the new method is capable of ejecting water droplets up to 1 mm in diameter (controlled by driving pulse width), from water surface 25 mm above the transducer.\",\"PeriodicalId\":6776,\"journal\":{\"name\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"42 1\",\"pages\":\"58-61\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMS46641.2020.9056313\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056313","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MEMS Focused Ultrasonic Transducer with Air-Cavity Lens Based on Polydimethylsiloxane (PDMS) Membrane
We present a novel and easy fabrication method to manufacture Polydimethylsiloxane (PDMS) Fresnel air-cavity acoustic lens for focused ultrasonic transducers with long focal length. The process involves casting PDMS membrane with a silicon mold and bonding the PDMS membrane on a lead zirconate titanate (PZT) sheet with ultraviolet (UV)-curable adhesive. A 2.32-MHz focused ultrasonic transducer fabricated with the new method is capable of ejecting water droplets up to 1 mm in diameter (controlled by driving pulse width), from water surface 25 mm above the transducer.
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