用三甲基氯硅烷飞升液滴喷雾热解法制备纳米碳化硅

Doklady of the National Academy of Sciences of Belarus Pub Date : 2020-03-20 DOI:10.29235/1561-8323-2020-64-1-111-115

И. Саверченко, Ю. А. Ходыко, Н. Н. Черенда, Viktor I. Saverchenko, Yuliya А. Khodyko, Nicolay N. Cherenda

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引用次数: 1

摘要

首次在氩气流动的气溶胶反应器中，对三甲基氯硅烷液滴进行喷雾热解制备了纳米碳化硅。结果表明，随着反应器壁温度升高至1100℃，样品纯度增大，纳米颗粒的平均尺寸为6 ~ 40 nm。

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Production of silicon carbide nanoparticles by spray pyrolysis from femtoliter droplets of chlorotrimethylsilane

For the first time, silicon carbide nanoparticles were obtained by spray pyrolysis of chlorotrimethylsilane droplets in an aerosol reactor with argon flow. It was shown that with an increase in the reactor wall temperature to 1100 °C, the sample purity degree grows, and the average size of the nanoparticles is 6-40 nm.

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Doklady of the National Academy of Sciences of Belarus

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