用常压等离子体工艺制备两种模式下的大孔径连续相板

IF 3.3 2区物理与天体物理 Q2 OPTICS Chinese Optics Letters Pub Date : 2018-09-06 DOI:10.3788/COL201816.102201

Xing Su, L. Xia, Kan Liu, Peng Zhang, Ping Li, Zhao Runchang, Bo Wang

{"title":"用常压等离子体工艺制备两种模式下的大孔径连续相板","authors":"Xing Su, L. Xia, Kan Liu, Peng Zhang, Ping Li, Zhao Runchang, Bo Wang","doi":"10.3788/COL201816.102201","DOIUrl":null,"url":null,"abstract":"In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).","PeriodicalId":10293,"journal":{"name":"Chinese Optics Letters","volume":"186 1","pages":"102201"},"PeriodicalIF":3.3000,"publicationDate":"2018-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing\",\"authors\":\"Xing Su, L. Xia, Kan Liu, Peng Zhang, Ping Li, Zhao Runchang, Bo Wang\",\"doi\":\"10.3788/COL201816.102201\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).\",\"PeriodicalId\":10293,\"journal\":{\"name\":\"Chinese Optics Letters\",\"volume\":\"186 1\",\"pages\":\"102201\"},\"PeriodicalIF\":3.3000,\"publicationDate\":\"2018-09-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Chinese Optics Letters\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.3788/COL201816.102201\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Chinese Optics Letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3788/COL201816.102201","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 12

摘要

为了高效、高精度地利用常压等离子体加工(APPP)制备大口径连续相板(CPP)，提出了位置驻留模式和速度模式，并建立了非恒定去除速率的迭代计算方法。采用两种加工方式制备了两个320 mm × 320 mm × 2 mm的聚苯乙烯复合材料。实验结果表明，速度模式能够显著减少加工时间和形状误差。总加工时间从13.2 h减少到9.3 h，表面形状误差从0.158λ减少到0.119λ (λ = 632.8 nm)(均方根)。

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Fabrication of a large-aperture continuous phase plate in two modes using atmospheric pressure plasma processing

In order to fabricate a large-aperture continuous phase plate (CPP) using atmospheric pressure plasma processing (APPP) with high efficiency and precision, the position dwell mode and velocity mode were proposed and the iterative calculation method was developed for the non-constant removal rate. Two 320 mm × 320 mm × 2 mm CPPs were fabricated with two processing modes. The experiment results show that the velocity mode is capable of significantly reducing the processing time and shape error. The total processing time is decreased from 13.2 h to 9.3 h, and the surface shape error is decreased from 0.158λ to 0.119λ (λ = 632.8 nm) (root mean square).

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来源期刊

Chinese Optics Letters 物理-光学

CiteScore

5.60

自引率

20.00%

发文量

180

审稿时长

2.3 months

期刊介绍： Chinese Optics Letters (COL) is an international journal aimed at the rapid dissemination of latest, important discoveries and inventions in all branches of optical science and technology. It is considered to be one of the most important journals in optics in China. It is collected by The Optical Society (OSA) Publishing Digital Library and also indexed by Science Citation Index (SCI), Engineering Index (EI), etc. COL is distinguished by its short review period (~30 days) and publication period (~100 days). With its debut in January 2003, COL is published monthly by Chinese Laser Press, and distributed by OSA outside of Chinese Mainland.