{"title":"多角形镜面角轮廓测量系统的研制","authors":"Shizhou Zhang, S. Kiyono, Y. Uda, Masami Mito","doi":"10.2493/JJSPE.62.589","DOIUrl":null,"url":null,"abstract":"This paper describes a new automatic calibration system for the polygon mirror. A new differential method which can calibrate simultaneously and autonomously the dividing errors of a polygon mirror and angular profile of surface is proposed. The basic principle of the system depends on the self-check-method of two autocollimators. This system consists of two angle sensors with 0.02 s (arc) resolution as a differential probe, a rotary table for giving angular displacement and an XZ-axis stage for scanning surfaces of the polygon mirror. As an example for the experiment, a 24-sided polygon mirror has been calibrated on the system and its effectiveness has been confirmed. It was found that the repeatability error of calibration was about 0.2 s (arc).","PeriodicalId":14336,"journal":{"name":"International Journal of The Japan Society for Precision Engineering","volume":"31 1","pages":"349-350"},"PeriodicalIF":0.0000,"publicationDate":"1996-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Development of measurement system of angular profile of the polygonal mirror surface\",\"authors\":\"Shizhou Zhang, S. Kiyono, Y. Uda, Masami Mito\",\"doi\":\"10.2493/JJSPE.62.589\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes a new automatic calibration system for the polygon mirror. A new differential method which can calibrate simultaneously and autonomously the dividing errors of a polygon mirror and angular profile of surface is proposed. The basic principle of the system depends on the self-check-method of two autocollimators. This system consists of two angle sensors with 0.02 s (arc) resolution as a differential probe, a rotary table for giving angular displacement and an XZ-axis stage for scanning surfaces of the polygon mirror. As an example for the experiment, a 24-sided polygon mirror has been calibrated on the system and its effectiveness has been confirmed. It was found that the repeatability error of calibration was about 0.2 s (arc).\",\"PeriodicalId\":14336,\"journal\":{\"name\":\"International Journal of The Japan Society for Precision Engineering\",\"volume\":\"31 1\",\"pages\":\"349-350\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1996-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of The Japan Society for Precision Engineering\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2493/JJSPE.62.589\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of The Japan Society for Precision Engineering","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2493/JJSPE.62.589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Development of measurement system of angular profile of the polygonal mirror surface
This paper describes a new automatic calibration system for the polygon mirror. A new differential method which can calibrate simultaneously and autonomously the dividing errors of a polygon mirror and angular profile of surface is proposed. The basic principle of the system depends on the self-check-method of two autocollimators. This system consists of two angle sensors with 0.02 s (arc) resolution as a differential probe, a rotary table for giving angular displacement and an XZ-axis stage for scanning surfaces of the polygon mirror. As an example for the experiment, a 24-sided polygon mirror has been calibrated on the system and its effectiveness has been confirmed. It was found that the repeatability error of calibration was about 0.2 s (arc).
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