射频磁控溅射制备具有温控缓冲层的β-Ga2O3薄膜的研究

IF 3.1 4区 医学 Q2 BIOPHYSICS Journal of Applied Biomaterials & Functional Materials Pub Date : 2022-09-30 DOI:10.35745/afm2022v02.03.0003
Yi Liu, T. He, Sufen Wei
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引用次数: 0

摘要

采用射频磁控溅射技术在(0006)蓝宝石衬底上制备了β-Ga2O3薄膜。溅射功率为80 W,溅射时间为10 min,总流量为40 sccm,在氧气和氩气中(氧气比为2.5%)溅射。采用温度调制的方法,利用不同的制备温度进行分层。先生长一层均匀的β-Ga2O3缓冲层,再在其上生长第二层β-Ga2O3薄膜。当不同温度组合的分层溅射完成后,进行相同参数的高温热退火。比较分析了退火后均匀缓冲层和顶层在不同温度下的制备顺序对β-Ga2O3薄膜结构、表面形貌和光学性能的影响。最后,根据分层制备温度参数,总结出最佳的分层温度参数。
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Study on Preparing β-Ga2O3 Films with Temperature-Controlled Buffer Layer by RF Magnetron Sputtering
β-Ga2O3 thin films were prepared on (0006) sapphire substrates by RF magnetron sputtering. Under the conditions of sputtering power of 80 W, time of 10 min, and total flow rate of 40 sccm in oxygen and argon atmosphere (2.5 % oxygen ratio). Different preparation temperatures were used to conduct layering by temperature modulation. A homogenous β-Ga2O3 buffer layer was grown first, and then the second β-Ga2O3 film was grown on top of it. When the stratified sputtering of different temperature combinations was completed, high-temperature thermal annealing with the same parameters was performed. The effects on the structure, surface morphology, and optical properties of β-Ga2O3 thin films were compared and analyzed when using the preparation sequence of the homogenous buffer layer and the top layer at different temperatures after annealing. Finally, based on the stratified preparation temperature parameters, the optimal stratified temperature parameters were summarized.
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来源期刊
Journal of Applied Biomaterials & Functional Materials
Journal of Applied Biomaterials & Functional Materials BIOPHYSICS-ENGINEERING, BIOMEDICAL
CiteScore
4.40
自引率
4.00%
发文量
36
审稿时长
>12 weeks
期刊介绍: The Journal of Applied Biomaterials & Functional Materials (JABFM) is an open access, peer-reviewed, international journal considering the publication of original contributions, reviews and editorials dealing with clinical and laboratory investigations in the fast growing field of biomaterial sciences and functional materials. The areas covered by the journal will include: • Biomaterials / Materials for biomedical applications • Functional materials • Hybrid and composite materials • Soft materials • Hydrogels • Nanomaterials • Gene delivery • Nonodevices • Metamaterials • Active coatings • Surface functionalization • Tissue engineering • Cell delivery/cell encapsulation systems • 3D printing materials • Material characterization • Biomechanics
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