Research of a Miniaturized Broadband Mems Phase Detector and its Temperature Effect for Application in Phase-Locked Loops

This paper presents the miniaturization of a broadband MEMS phase detector for X-band application and a new phase-locked loop system based on it. Miniaturization approach of capacitive loading is adopted and a size-reduction of 60% is achieved. Measured S-parameter shows return loss S11 smaller than −15 dB over X-band. Broadband property of phase detection is also verified through experiments. Temperature effect of the phase detector is studied. An integrated PLL circuit model is established with temperature compensation incorporated. Validity of the PLL is confirmed by simulation with respect to tracking and synchronization.