金刚石种子附着工艺对火焰燃烧在碳化钨基体上合成金刚石薄膜的影响

Mamoru Takahashi, O. Kamiya
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引用次数: 0

摘要

火焰燃烧法是通过乙炔-氧气在环境空气中火焰燃烧合成金刚石的方法。近年来,碳化钨作为切削工具被广泛应用于机械加工行业和牙科加工领域。为了获得高质量的金刚石膜并在WC衬底上获得良好的附着力,采用火焰燃烧法在WC衬底上合成了金刚石膜。然而,通过这种方法合成的金刚石膜的表面粗糙度增加,有必要降低这种粗糙度。考虑到切削过程中工件表面的粗糙度精度和刀具的性能,合成的金刚石膜表面粗糙度较小是理想的。在本研究中,为了降低表面粗糙度,以金刚石种子颗粒为生成核的金刚石浆料的数量被仔细地改变,用于金刚石膜的金刚石种子附着加工。在碳化钨衬底表面火焰燃烧合成金刚石薄膜时,含有金刚石种子颗粒的金刚石浆料的数量影响合成金刚石薄膜的表面形貌和表面粗糙度。此外,为了研究这一结果的原因,我们通过扫描电镜观察了合成初期基底上原子核的生成情况以及播种处理后基底表面金刚石种子颗粒的形成情况。研究了金刚石种子附着工艺对火焰燃烧合成金刚石薄膜的影响。确定了表面粗糙度、合成初期衬底上的金刚石生成核数、金刚石播种后衬底上的金刚石颗粒数和金刚石浆料用量之间的关系。
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Influence of Diamond Seed Attachment Processing on Diamond Films Synthesized on Tungsten Carbide Substrate by Flame Combustion
The flame combustion method enables the synthesis of diamonds via acetylene-oxygen gas flame combustion in ambient air. Tungsten carbide (WC) has recently been utilized as a cutting tool in the machining industry and in dental machining applications. To obtain high-quality diamond films and achieve good adhesion on a WC substrate, diamond films are synthesized on a WC substrate by the flame combustion method. However, the surface roughness of most of the diamond films synthesized by this method increased, and it was necessary to reduce this roughness. Considering the roughness accuracy of the workpiece surface during cutting, and the performance of the cutting tool, a smaller surface roughness of the diamond films synthesized is desirable. In this study, to reduce surface roughness, the amount of diamond paste with diamond seed particles as generation nuclei was carefully varied for diamond seed attachment processing of diamond films. When diamond films were synthesized on the WC substrate surface via the flame combustion, the amount of diamond paste with diamond seed particles affected the surface morphology and surface roughness of the synthesized diamond films. Furthermore, to investigate the reason for this result, generation of nuclei on the substrate in the initial stages of synthesis and diamond seed particles on the substrate surface after the seeding treatment were observed by scanning electron microscopy. The effect of diamond seed attachment processing on the diamond films synthesized by flame combustion was studied. The relationship between the surface roughness, number of diamond generation nuclei on the substrate in the initial stages of synthesis, number of diamond particles on the substrate after the diamond seeding process, and amount of diamond paste were confirmed.
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